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- W4200344944 abstract "In this work, the first surface acoustic-wave-based magnetic field sensor using thin-film AlScN as piezoelectric material deposited on a silicon substrate is presented. The fabrication is based on standard semiconductor technology. The acoustically active area consists of an AlScN layer that can be excited with interdigital transducers, a smoothing SiO2 layer, and a magnetostrictive FeCoSiB film. The detection limit of this sensor is 2.4 nT/Hz at 10 Hz and 72 pT/Hz at 10 kHz at an input power of 20 dBm. The dynamic range was found to span from about ±1.7 mT to the corresponding limit of detection, leading to an interval of about 8 orders of magnitude. Fabrication, achieved sensitivity, and noise floor of the sensors are presented." @default.
- W4200344944 created "2021-12-31" @default.
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- W4200344944 date "2021-12-07" @default.
- W4200344944 modified "2023-10-15" @default.
- W4200344944 title "Thin-Film-Based SAW Magnetic Field Sensors" @default.
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- W4200344944 doi "https://doi.org/10.3390/s21248166" @default.
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