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• W4200393916 abstract "Abstract Recent advances in photonic integrated circuits have enabled a new generation of programmable Mach–Zehnder meshes (MZMs) realized by using cascaded Mach–Zehnder interferometers capable of universal linear-optical transformations on N input/output optical modes. MZMs serve critical functions in photonic quantum information processing, quantum-enhanced sensor networks, machine learning and other applications. However, MZM implementations reported to date rely on thermo-optic phase shifters, which limit applications due to slow response times and high power consumption. Here we introduce a large-scale MZM platform made in a 200 mm complementary metal–oxide–semiconductor foundry, which uses aluminium nitride piezo-optomechanical actuators coupled to silicon nitride waveguides, enabling low-loss propagation with phase modulation at greater than 100 MHz in the visible–near-infrared wavelengths. Moreover, the vanishingly low hold-power consumption of the piezo-actuators enables these photonic integrated circuits to operate at cryogenic temperatures, paving the way for a fully integrated device architecture for a range of quantum applications." @default.
• W4200393916 created "2021-12-31" @default.
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• W4200393916 date "2021-12-13" @default.
• W4200393916 modified "2023-10-16" @default.
• W4200393916 title "High-speed programmable photonic circuits in a cryogenically compatible, visible–near-infrared 200 mm CMOS architecture" @default.
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• W4200393916 doi "https://doi.org/10.1038/s41566-021-00903-x" @default.
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