Matches in SemOpenAlex for { <https://semopenalex.org/work/W4200483923> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W4200483923 endingPage "012089" @default.
- W4200483923 startingPage "012089" @default.
- W4200483923 abstract "Abstract An electron gun with a hollow cathode was tuned to be used in electron beam annealing. Electron beams with an energy of 1 keV and a current of 100 mA were obtained. It is shown that the diameter of the electron beam varies in the range from 7 to 5 mm, while the specific power is from 2·10 5 to 2·10 4 W/m 2 . Such electron beams have a soft, non-destructive effect on the surface and are suitable for electron beam annealing of various films." @default.
- W4200483923 created "2021-12-31" @default.
- W4200483923 creator A5006035488 @default.
- W4200483923 creator A5034694515 @default.
- W4200483923 date "2021-12-01" @default.
- W4200483923 modified "2023-09-24" @default.
- W4200483923 title "Hollow cathode gun for electron beam annealing" @default.
- W4200483923 cites W2005521236 @default.
- W4200483923 cites W2024643459 @default.
- W4200483923 cites W2147105188 @default.
- W4200483923 cites W2293075616 @default.
- W4200483923 cites W2810006154 @default.
- W4200483923 doi "https://doi.org/10.1088/1742-6596/2119/1/012089" @default.
- W4200483923 hasPublicationYear "2021" @default.
- W4200483923 type Work @default.
- W4200483923 citedByCount "0" @default.
- W4200483923 crossrefType "journal-article" @default.
- W4200483923 hasAuthorship W4200483923A5006035488 @default.
- W4200483923 hasAuthorship W4200483923A5034694515 @default.
- W4200483923 hasBestOaLocation W42004839231 @default.
- W4200483923 hasConcept C109486029 @default.
- W4200483923 hasConcept C120665830 @default.
- W4200483923 hasConcept C121332964 @default.
- W4200483923 hasConcept C147120987 @default.
- W4200483923 hasConcept C147789679 @default.
- W4200483923 hasConcept C159985019 @default.
- W4200483923 hasConcept C168834538 @default.
- W4200483923 hasConcept C179156687 @default.
- W4200483923 hasConcept C184779094 @default.
- W4200483923 hasConcept C185544564 @default.
- W4200483923 hasConcept C185592680 @default.
- W4200483923 hasConcept C192562407 @default.
- W4200483923 hasConcept C2777855556 @default.
- W4200483923 hasConcept C49110097 @default.
- W4200483923 hasConcept C95312477 @default.
- W4200483923 hasConceptScore W4200483923C109486029 @default.
- W4200483923 hasConceptScore W4200483923C120665830 @default.
- W4200483923 hasConceptScore W4200483923C121332964 @default.
- W4200483923 hasConceptScore W4200483923C147120987 @default.
- W4200483923 hasConceptScore W4200483923C147789679 @default.
- W4200483923 hasConceptScore W4200483923C159985019 @default.
- W4200483923 hasConceptScore W4200483923C168834538 @default.
- W4200483923 hasConceptScore W4200483923C179156687 @default.
- W4200483923 hasConceptScore W4200483923C184779094 @default.
- W4200483923 hasConceptScore W4200483923C185544564 @default.
- W4200483923 hasConceptScore W4200483923C185592680 @default.
- W4200483923 hasConceptScore W4200483923C192562407 @default.
- W4200483923 hasConceptScore W4200483923C2777855556 @default.
- W4200483923 hasConceptScore W4200483923C49110097 @default.
- W4200483923 hasConceptScore W4200483923C95312477 @default.
- W4200483923 hasIssue "1" @default.
- W4200483923 hasLocation W42004839231 @default.
- W4200483923 hasOpenAccess W4200483923 @default.
- W4200483923 hasPrimaryLocation W42004839231 @default.
- W4200483923 hasRelatedWork W15488486 @default.
- W4200483923 hasRelatedWork W16626228 @default.
- W4200483923 hasRelatedWork W22561690 @default.
- W4200483923 hasRelatedWork W2403876 @default.
- W4200483923 hasRelatedWork W25890056 @default.
- W4200483923 hasRelatedWork W30438916 @default.
- W4200483923 hasRelatedWork W30998572 @default.
- W4200483923 hasRelatedWork W9458004 @default.
- W4200483923 hasRelatedWork W17032895 @default.
- W4200483923 hasRelatedWork W3861669 @default.
- W4200483923 hasVolume "2119" @default.
- W4200483923 isParatext "false" @default.
- W4200483923 isRetracted "false" @default.
- W4200483923 workType "article" @default.