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- W420078204 abstract "Keywords: through silicon via (TSV) ; platinum ; via first ; high-temperature ; harsh-environment ; 3D integration ; radio frequency ; scattering-parameter (S-parameter) ; vacuum encapsulation ; eutectic bonding ; ohmic contact ; system-in-package These Ecole polytechnique federale de Lausanne EPFL, n° 5899 (2013)Programme doctoral Microsystemes et MicroelectroniqueFaculte des sciences et techniques de l'ingenieurInstitut de microtechniqueLaboratoire de capteurs, actuateurs et microsystemesJury: H. Shea (president), J. Brugger, M. Despont, S. Lani Public defense: 2013-10-10 Reference doi:10.5075/epfl-thesis-5899Print copy in library catalog Record created on 2013-10-07, modified on 2016-08-09" @default.
- W420078204 created "2016-06-24" @default.
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- W420078204 date "2013-01-01" @default.
- W420078204 modified "2023-09-23" @default.
- W420078204 title "3D-Integration of a Carbon Nanotube based RF-NEMS" @default.
- W420078204 doi "https://doi.org/10.5075/epfl-thesis-5899" @default.
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