Matches in SemOpenAlex for { <https://semopenalex.org/work/W4205652606> ?p ?o ?g. }
- W4205652606 abstract "We report a comprehensive analysis of the leakage current mechanism in ion implantation isolation (I/I/I) regions of GaN high electron mobility transistors. We applied a three-step high-energy low-dose N I/I/I to AlGaN/AlN/GaN heterostructures. High-quality isolation is achieved with isolation sheet resistances Rsh in the range of 1013–1015 Ω/sq. The analysis of isolated heterostructures with varied AlGaN or AlN thicknesses indicates common electron leakage paths at the surface of GaN. The electrostatics of the leakage path is determined by an interplay between the high densities of defects created by I/I/I, the net sheet polarization charges between III-nitrides, and the AlGaN surface states. We find that the activation energy of Rsh positively correlates with the energy level of the leakage path. The energy band diagram of the isolation region is constructed by correlating the activation energies of Rsh with the heteerostructure electrostatics. Moreover, our study makes a novel method to estimate the net active defect density caused by I/I/I: net active defect densities of ∼2 × 1019 and ∼2 × 1018 cm−3 are extracted in the GaN and AlGaN layers, respectively." @default.
- W4205652606 created "2022-01-25" @default.
- W4205652606 creator A5016143962 @default.
- W4205652606 creator A5040851808 @default.
- W4205652606 creator A5046242688 @default.
- W4205652606 creator A5056409480 @default.
- W4205652606 creator A5066899300 @default.
- W4205652606 creator A5076194686 @default.
- W4205652606 creator A5085080900 @default.
- W4205652606 creator A5079218074 @default.
- W4205652606 date "2022-01-18" @default.
- W4205652606 modified "2023-10-16" @default.
- W4205652606 title "Leakage mechanism in ion implantation isolated AlGaN/GaN heterostructures" @default.
- W4205652606 cites W1727684241 @default.
- W4205652606 cites W1916867014 @default.
- W4205652606 cites W1982381330 @default.
- W4205652606 cites W1989210356 @default.
- W4205652606 cites W1991846098 @default.
- W4205652606 cites W1997471716 @default.
- W4205652606 cites W1998437016 @default.
- W4205652606 cites W2013187253 @default.
- W4205652606 cites W2021554946 @default.
- W4205652606 cites W2024180452 @default.
- W4205652606 cites W2024380096 @default.
- W4205652606 cites W2034319382 @default.
- W4205652606 cites W2039665775 @default.
- W4205652606 cites W2041185763 @default.
- W4205652606 cites W2049275801 @default.
- W4205652606 cites W2051958619 @default.
- W4205652606 cites W2055197602 @default.
- W4205652606 cites W2057981956 @default.
- W4205652606 cites W2092966789 @default.
- W4205652606 cites W2107276527 @default.
- W4205652606 cites W2112920671 @default.
- W4205652606 cites W2131789983 @default.
- W4205652606 cites W2153514476 @default.
- W4205652606 cites W2153784824 @default.
- W4205652606 cites W2170550181 @default.
- W4205652606 cites W2259768559 @default.
- W4205652606 cites W2470145128 @default.
- W4205652606 cites W2484793367 @default.
- W4205652606 cites W3033734162 @default.
- W4205652606 cites W3204774927 @default.
- W4205652606 doi "https://doi.org/10.1063/5.0076243" @default.
- W4205652606 hasPublicationYear "2022" @default.
- W4205652606 type Work @default.
- W4205652606 citedByCount "4" @default.
- W4205652606 countsByYear W42056526062022 @default.
- W4205652606 countsByYear W42056526062023 @default.
- W4205652606 crossrefType "journal-article" @default.
- W4205652606 hasAuthorship W4205652606A5016143962 @default.
- W4205652606 hasAuthorship W4205652606A5040851808 @default.
- W4205652606 hasAuthorship W4205652606A5046242688 @default.
- W4205652606 hasAuthorship W4205652606A5056409480 @default.
- W4205652606 hasAuthorship W4205652606A5066899300 @default.
- W4205652606 hasAuthorship W4205652606A5076194686 @default.
- W4205652606 hasAuthorship W4205652606A5079218074 @default.
- W4205652606 hasAuthorship W4205652606A5085080900 @default.
- W4205652606 hasConcept C117626034 @default.
- W4205652606 hasConcept C121332964 @default.
- W4205652606 hasConcept C139719470 @default.
- W4205652606 hasConcept C145148216 @default.
- W4205652606 hasConcept C147120987 @default.
- W4205652606 hasConcept C147789679 @default.
- W4205652606 hasConcept C162057924 @default.
- W4205652606 hasConcept C162324750 @default.
- W4205652606 hasConcept C165801399 @default.
- W4205652606 hasConcept C172385210 @default.
- W4205652606 hasConcept C178790620 @default.
- W4205652606 hasConcept C185592680 @default.
- W4205652606 hasConcept C189278905 @default.
- W4205652606 hasConcept C192562407 @default.
- W4205652606 hasConcept C26873012 @default.
- W4205652606 hasConcept C2777042071 @default.
- W4205652606 hasConcept C35390186 @default.
- W4205652606 hasConcept C41823505 @default.
- W4205652606 hasConcept C49040817 @default.
- W4205652606 hasConcept C62520636 @default.
- W4205652606 hasConcept C79794668 @default.
- W4205652606 hasConceptScore W4205652606C117626034 @default.
- W4205652606 hasConceptScore W4205652606C121332964 @default.
- W4205652606 hasConceptScore W4205652606C139719470 @default.
- W4205652606 hasConceptScore W4205652606C145148216 @default.
- W4205652606 hasConceptScore W4205652606C147120987 @default.
- W4205652606 hasConceptScore W4205652606C147789679 @default.
- W4205652606 hasConceptScore W4205652606C162057924 @default.
- W4205652606 hasConceptScore W4205652606C162324750 @default.
- W4205652606 hasConceptScore W4205652606C165801399 @default.
- W4205652606 hasConceptScore W4205652606C172385210 @default.
- W4205652606 hasConceptScore W4205652606C178790620 @default.
- W4205652606 hasConceptScore W4205652606C185592680 @default.
- W4205652606 hasConceptScore W4205652606C189278905 @default.
- W4205652606 hasConceptScore W4205652606C192562407 @default.
- W4205652606 hasConceptScore W4205652606C26873012 @default.
- W4205652606 hasConceptScore W4205652606C2777042071 @default.
- W4205652606 hasConceptScore W4205652606C35390186 @default.
- W4205652606 hasConceptScore W4205652606C41823505 @default.
- W4205652606 hasConceptScore W4205652606C49040817 @default.
- W4205652606 hasConceptScore W4205652606C62520636 @default.
- W4205652606 hasConceptScore W4205652606C79794668 @default.