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- W4205756871 abstract "Abstract Nitridation of SiO 2 /4H-SiC(112̄0) interfaces with post-oxidation annealing in an NO ambient (NO-POA) and its impact on the electrical properties were investigated. Sub-nm-resolution nitrogen depth profiling at the interfaces was conducted by using a scanning X-ray photoelectron spectroscopy microprobe. The results showed that nitrogen atoms were incorporated just at the interface and that interface nitridation proceeded much faster than at SiO 2 /SiC(0001) interfaces, resulting in a 2.3 times higher nitrogen concentration. Electrical characterizations of metal-oxide-semiconductor capacitors were conducted through capacitance–voltage ( C – V ) measurements in the dark and under illumination with ultraviolet light to evaluate the interface defects near the conduction and valence band edges and those causing hysteresis and shifting of the C – V curves. While all of these defects were passivated with the progress of the interface nitridation, excessive nitridation resulted in degradation of the MOS capacitors. The optimal conditions for NO-POA are discussed on the basis of these experimental findings." @default.
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- W4205756871 date "2022-03-02" @default.
- W4205756871 modified "2023-10-17" @default.
- W4205756871 title "Comprehensive physical and electrical characterizations of NO nitrided SiO<sub>2</sub>/4H-SiC(112̄0) interfaces" @default.
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- W4205756871 doi "https://doi.org/10.35848/1347-4065/ac4685" @default.
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