FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4207037478> ?p ?o ?g. }

• W4207037478 endingPage "035021" @default.
• W4207037478 startingPage "035021" @default.
• W4207037478 abstract "Abstract Magnetorheological elastomers (MREs) are widely used in vibration control due to their excellent magneto-controlled mechanical properties. In this research, polyurethane-based MRE polishing pads were prepared and used for the polishing of single-crystal SiC to investigate the magneto-controlled mechanical properties, the magneto-polishing effect, and the mechanism of action thereof. The results show that the pre-structuring process is affected by parameters such as mass fraction and particle size of magnetic particles in MREs and curing magnetic field strength, different chain strings that demonstrate different magnetorheological effects are formed. The greater the mass fraction of magnetic particles and curing magnetic field strength, the more the MREs exhibit magnetorheological effects, especially so when the magnetic particles size of 3 μ m. A series of 90 min polishing experiments on single-crystal SiC with original surface roughness ( R a ) 80 nm were conducted using an MRE pad. The results indicate that with the increase of polishing magnetic field strengths, the shear modulus of MRE polishing pads increases, the material removal rate (MRR) of the polishing process increases and R a decreases. As the magnetic field strength is increased from 0 mT to 335 mT, the shear modulus is increased from 1.392 MPa to 1.825 MPa (an increase of 31.1%), while MRR is increased from 706.3 nm h −1 to 835.3 nm h −1 (an increase of 18.3%), R a is decreased from 19.92 nm to 3.62 nm (an improvement in surface quality of 81.8%). The results show that the increase of the polishing magnetic field strengths changes the material modulus of the MRE polishing pads, which cause the decreases in the compressive and shear elastic deformation of the abrasive grains on the elastic substrate. This increases the positive pressure of the abrasive grains on the SiC wafer, which enhances the material-removal ability of the SiC wafer, thereby improving the surface quality of the wafer." @default.
• W4207037478 created "2022-01-26" @default.
• W4207037478 creator A5007269705 @default.
• W4207037478 creator A5007486537 @default.
• W4207037478 creator A5008154375 @default.
• W4207037478 creator A5038332765 @default.
• W4207037478 creator A5049391067 @default.
• W4207037478 creator A5077771982 @default.
• W4207037478 date "2022-02-07" @default.
• W4207037478 modified "2023-09-25" @default.
• W4207037478 title "A study of the magneto-controlled mechanical properties and polishing performance for single-crystal SiC used as a magnetorheological-elastomer polishing pad" @default.
• W4207037478 cites W1968866173 @default.
• W4207037478 cites W1981125039 @default.
• W4207037478 cites W2003349207 @default.
• W4207037478 cites W2005277019 @default.
• W4207037478 cites W2010722527 @default.
• W4207037478 cites W2021612534 @default.
• W4207037478 cites W2026411920 @default.
• W4207037478 cites W2027569508 @default.
• W4207037478 cites W2033901538 @default.
• W4207037478 cites W2041864272 @default.
• W4207037478 cites W2063836305 @default.
• W4207037478 cites W2065928266 @default.
• W4207037478 cites W2072674196 @default.
• W4207037478 cites W2090581336 @default.
• W4207037478 cites W2092874501 @default.
• W4207037478 cites W2129323939 @default.
• W4207037478 cites W2168204048 @default.
• W4207037478 cites W2226862119 @default.
• W4207037478 cites W2296670422 @default.
• W4207037478 cites W2511754991 @default.
• W4207037478 cites W2577976329 @default.
• W4207037478 cites W2773666359 @default.
• W4207037478 cites W2901317814 @default.
• W4207037478 cites W2921045742 @default.
• W4207037478 cites W2941899588 @default.
• W4207037478 cites W2990630759 @default.
• W4207037478 cites W3084654062 @default.
• W4207037478 cites W3092290616 @default.
• W4207037478 doi "https://doi.org/10.1088/1361-665x/ac4db6" @default.
• W4207037478 hasPublicationYear "2022" @default.
• W4207037478 type Work @default.
• W4207037478 citedByCount "4" @default.
• W4207037478 countsByYear W42070374782022 @default.
• W4207037478 countsByYear W42070374782023 @default.
• W4207037478 crossrefType "journal-article" @default.
• W4207037478 hasAuthorship W4207037478A5007269705 @default.
• W4207037478 hasAuthorship W4207037478A5007486537 @default.
• W4207037478 hasAuthorship W4207037478A5008154375 @default.
• W4207037478 hasAuthorship W4207037478A5038332765 @default.
• W4207037478 hasAuthorship W4207037478A5049391067 @default.
• W4207037478 hasAuthorship W4207037478A5077771982 @default.
• W4207037478 hasConcept C107365816 @default.
• W4207037478 hasConcept C108619579 @default.
• W4207037478 hasConcept C115260700 @default.
• W4207037478 hasConcept C116628846 @default.
• W4207037478 hasConcept C121332964 @default.
• W4207037478 hasConcept C132976073 @default.
• W4207037478 hasConcept C138113353 @default.
• W4207037478 hasConcept C159985019 @default.
• W4207037478 hasConcept C180088628 @default.
• W4207037478 hasConcept C192562407 @default.
• W4207037478 hasConcept C2778378731 @default.
• W4207037478 hasConcept C38052585 @default.
• W4207037478 hasConcept C62520636 @default.
• W4207037478 hasConceptScore W4207037478C107365816 @default.
• W4207037478 hasConceptScore W4207037478C108619579 @default.
• W4207037478 hasConceptScore W4207037478C115260700 @default.
• W4207037478 hasConceptScore W4207037478C116628846 @default.
• W4207037478 hasConceptScore W4207037478C121332964 @default.
• W4207037478 hasConceptScore W4207037478C132976073 @default.
• W4207037478 hasConceptScore W4207037478C138113353 @default.
• W4207037478 hasConceptScore W4207037478C159985019 @default.
• W4207037478 hasConceptScore W4207037478C180088628 @default.
• W4207037478 hasConceptScore W4207037478C192562407 @default.
• W4207037478 hasConceptScore W4207037478C2778378731 @default.
• W4207037478 hasConceptScore W4207037478C38052585 @default.
• W4207037478 hasConceptScore W4207037478C62520636 @default.
• W4207037478 hasFunder F4320321001 @default.
• W4207037478 hasIssue "3" @default.
• W4207037478 hasLocation W42070374781 @default.
• W4207037478 hasOpenAccess W4207037478 @default.
• W4207037478 hasPrimaryLocation W42070374781 @default.
• W4207037478 hasRelatedWork W2015750174 @default.
• W4207037478 hasRelatedWork W2022152764 @default.
• W4207037478 hasRelatedWork W2053781001 @default.
• W4207037478 hasRelatedWork W2382571255 @default.
• W4207037478 hasRelatedWork W2530302615 @default.
• W4207037478 hasRelatedWork W3034220714 @default.
• W4207037478 hasRelatedWork W3089760805 @default.
• W4207037478 hasRelatedWork W3107218580 @default.
• W4207037478 hasRelatedWork W3196178889 @default.
• W4207037478 hasRelatedWork W4207037478 @default.
• W4207037478 hasVolume "31" @default.
• W4207037478 isParatext "false" @default.
• W4207037478 isRetracted "false" @default.
• W4207037478 workType "article" @default.