FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4210371615> ?p ?o ?g. }

• W4210371615 abstract "Abstract Through‐silicon vias (TSVs) technology provides an effective approach for “more than Moore,” however, the stress caused by TSVs may cause the surrounding devices to be squeezed and cause failure. In order to reduce the thermal stress of the TSV while innovatively considering the anisotropy of the silicon substrate, a shallow trench isolation (STI) structure was designed, and the influence of the shape and size of the STI on the stress reduction effect was studied. The research results show that the petal‐shaped STI structure reduces the thermal stress caused by TSV by 26% and the KOZ area by 31%, which provides a solution for reducing the stress and KOZ area in the anisotropic silicon substrate." @default.
• W4210371615 created "2022-02-08" @default.
• W4210371615 creator A5029610013 @default.
• W4210371615 creator A5038561808 @default.
• W4210371615 creator A5038846309 @default.
• W4210371615 creator A5041439103 @default.
• W4210371615 creator A5083212136 @default.
• W4210371615 date "2022-01-23" @default.
• W4210371615 modified "2023-10-16" @default.
• W4210371615 title "Shallow trench isolation structure design for through‐silicon vias stress reduction" @default.
• W4210371615 cites W1565947964 @default.
• W4210371615 cites W2016089829 @default.
• W4210371615 cites W2019238070 @default.
• W4210371615 cites W2043890437 @default.
• W4210371615 cites W2329051939 @default.
• W4210371615 cites W2370019894 @default.
• W4210371615 cites W2508968083 @default.
• W4210371615 cites W2581044850 @default.
• W4210371615 cites W2592071954 @default.
• W4210371615 cites W2741571441 @default.
• W4210371615 cites W2950279867 @default.
• W4210371615 cites W3005962362 @default.
• W4210371615 cites W3014893309 @default.
• W4210371615 cites W3109375275 @default.
• W4210371615 doi "https://doi.org/10.1002/jnm.2988" @default.
• W4210371615 hasPublicationYear "2022" @default.
• W4210371615 type Work @default.
• W4210371615 citedByCount "1" @default.
• W4210371615 countsByYear W42103716152023 @default.
• W4210371615 crossrefType "journal-article" @default.
• W4210371615 hasAuthorship W4210371615A5029610013 @default.
• W4210371615 hasAuthorship W4210371615A5038561808 @default.
• W4210371615 hasAuthorship W4210371615A5038846309 @default.
• W4210371615 hasAuthorship W4210371615A5041439103 @default.
• W4210371615 hasAuthorship W4210371615A5083212136 @default.
• W4210371615 hasConcept C105066941 @default.
• W4210371615 hasConcept C111335779 @default.
• W4210371615 hasConcept C111368507 @default.
• W4210371615 hasConcept C120665830 @default.
• W4210371615 hasConcept C121332964 @default.
• W4210371615 hasConcept C127313418 @default.
• W4210371615 hasConcept C138885662 @default.
• W4210371615 hasConcept C153294291 @default.
• W4210371615 hasConcept C155310634 @default.
• W4210371615 hasConcept C15744967 @default.
• W4210371615 hasConcept C159985019 @default.
• W4210371615 hasConcept C192562407 @default.
• W4210371615 hasConcept C204530211 @default.
• W4210371615 hasConcept C21036866 @default.
• W4210371615 hasConcept C2524010 @default.
• W4210371615 hasConcept C2777289219 @default.
• W4210371615 hasConcept C2779227376 @default.
• W4210371615 hasConcept C2987238706 @default.
• W4210371615 hasConcept C33923547 @default.
• W4210371615 hasConcept C41895202 @default.
• W4210371615 hasConcept C45632049 @default.
• W4210371615 hasConcept C49040817 @default.
• W4210371615 hasConcept C542102704 @default.
• W4210371615 hasConcept C544956773 @default.
• W4210371615 hasConcept C85725439 @default.
• W4210371615 hasConceptScore W4210371615C105066941 @default.
• W4210371615 hasConceptScore W4210371615C111335779 @default.
• W4210371615 hasConceptScore W4210371615C111368507 @default.
• W4210371615 hasConceptScore W4210371615C120665830 @default.
• W4210371615 hasConceptScore W4210371615C121332964 @default.
• W4210371615 hasConceptScore W4210371615C127313418 @default.
• W4210371615 hasConceptScore W4210371615C138885662 @default.
• W4210371615 hasConceptScore W4210371615C153294291 @default.
• W4210371615 hasConceptScore W4210371615C155310634 @default.
• W4210371615 hasConceptScore W4210371615C15744967 @default.
• W4210371615 hasConceptScore W4210371615C159985019 @default.
• W4210371615 hasConceptScore W4210371615C192562407 @default.
• W4210371615 hasConceptScore W4210371615C204530211 @default.
• W4210371615 hasConceptScore W4210371615C21036866 @default.
• W4210371615 hasConceptScore W4210371615C2524010 @default.
• W4210371615 hasConceptScore W4210371615C2777289219 @default.
• W4210371615 hasConceptScore W4210371615C2779227376 @default.
• W4210371615 hasConceptScore W4210371615C2987238706 @default.
• W4210371615 hasConceptScore W4210371615C33923547 @default.
• W4210371615 hasConceptScore W4210371615C41895202 @default.
• W4210371615 hasConceptScore W4210371615C45632049 @default.
• W4210371615 hasConceptScore W4210371615C49040817 @default.
• W4210371615 hasConceptScore W4210371615C542102704 @default.
• W4210371615 hasConceptScore W4210371615C544956773 @default.
• W4210371615 hasConceptScore W4210371615C85725439 @default.
• W4210371615 hasFunder F4320321001 @default.
• W4210371615 hasFunder F4320326297 @default.
• W4210371615 hasIssue "4" @default.
• W4210371615 hasLocation W42103716151 @default.
• W4210371615 hasOpenAccess W4210371615 @default.
• W4210371615 hasPrimaryLocation W42103716151 @default.
• W4210371615 hasRelatedWork W1598176851 @default.
• W4210371615 hasRelatedWork W1992381812 @default.
• W4210371615 hasRelatedWork W2092438402 @default.
• W4210371615 hasRelatedWork W2096400503 @default.
• W4210371615 hasRelatedWork W2153002732 @default.
• W4210371615 hasRelatedWork W2533445901 @default.
• W4210371615 hasRelatedWork W2545944103 @default.
• W4210371615 hasRelatedWork W2613612049 @default.
• W4210371615 hasRelatedWork W2954252974 @default.

• next