Matches in SemOpenAlex for { <https://semopenalex.org/work/W4210546295> ?p ?o ?g. }
Showing items 1 to 45 of
45
with 100 items per page.
- W4210546295 endingPage "182" @default.
- W4210546295 startingPage "173" @default.
- W4210546295 abstract "Many cryopumps have been used to produce clean vacuum for LSI manufacturing equipment and experimental equipment of fusion reactor, etc. In this paper, the pumping principle of cryopump is described. A structure and operation of the cryopump with a closed-cycle refrigerator are also described. Recently, some types of cryopumps which are just suitable to the function of particular purposes have been developed. For examples of these cryopumps, cryopump for ultra high vacuum, cryopump with high pumping speed and cryopump for sputtering equipment are also introduced." @default.
- W4210546295 created "2022-02-08" @default.
- W4210546295 creator A5005765240 @default.
- W4210546295 date "1988-01-01" @default.
- W4210546295 modified "2023-09-26" @default.
- W4210546295 title "Small cryopump." @default.
- W4210546295 doi "https://doi.org/10.2221/jcsj.23.173" @default.
- W4210546295 hasPublicationYear "1988" @default.
- W4210546295 type Work @default.
- W4210546295 citedByCount "0" @default.
- W4210546295 crossrefType "journal-article" @default.
- W4210546295 hasAuthorship W4210546295A5005765240 @default.
- W4210546295 hasBestOaLocation W42105462951 @default.
- W4210546295 hasConcept C116915560 @default.
- W4210546295 hasConcept C125557594 @default.
- W4210546295 hasConcept C127413603 @default.
- W4210546295 hasConcept C192562407 @default.
- W4210546295 hasConcept C70907840 @default.
- W4210546295 hasConcept C78519656 @default.
- W4210546295 hasConceptScore W4210546295C116915560 @default.
- W4210546295 hasConceptScore W4210546295C125557594 @default.
- W4210546295 hasConceptScore W4210546295C127413603 @default.
- W4210546295 hasConceptScore W4210546295C192562407 @default.
- W4210546295 hasConceptScore W4210546295C70907840 @default.
- W4210546295 hasConceptScore W4210546295C78519656 @default.
- W4210546295 hasIssue "4" @default.
- W4210546295 hasLocation W42105462951 @default.
- W4210546295 hasOpenAccess W4210546295 @default.
- W4210546295 hasPrimaryLocation W42105462951 @default.
- W4210546295 hasRelatedWork W1481608257 @default.
- W4210546295 hasRelatedWork W1584151936 @default.
- W4210546295 hasRelatedWork W192509571 @default.
- W4210546295 hasRelatedWork W1980384024 @default.
- W4210546295 hasRelatedWork W2007452218 @default.
- W4210546295 hasRelatedWork W2037847113 @default.
- W4210546295 hasRelatedWork W2071853549 @default.
- W4210546295 hasRelatedWork W2318377704 @default.
- W4210546295 hasRelatedWork W2328748856 @default.
- W4210546295 hasRelatedWork W3041442671 @default.
- W4210546295 hasVolume "23" @default.
- W4210546295 isParatext "false" @default.
- W4210546295 isRetracted "false" @default.
- W4210546295 workType "article" @default.