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• W4210722141 endingPage "SC1073" @default.
• W4210722141 startingPage "SC1073" @default.
• W4210722141 abstract "Abstract We present SiO 2 /GaN interfaces with a low interface state density and a high breakdown electric field. The SiO 2 films were deposited by plasma-enhanced atomic layer deposition (ALD) using bis(diethylamino)silane and O 2 plasma at 300 °C on n-type GaN (0001) homoepitaxial layers. An interface state density of less than 10 11 cm −2 eV −1 at 0.3 eV below the conduction band edge was confirmed by the conductance method. The value is much lower than those of previously reported ALD-SiO 2 /GaN interfaces (10 12 –10 13 cm −2 eV −1 ). A low fixed charge density at the SiO 2 /GaN interface of 3.7 <?CDATA ${rm{times }}$?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:mi mathvariant=normal>×</mml:mi> </mml:math> 10 11 cm −2 and a high dielectric breakdown field of ~10 MV cm –1 were obtained. Moreover, the interface state density and current−voltage characteristics were further improved by post-deposition annealing at 400 °C in N 2 ambient. Scanning transmission electron microscopy with energy-dispersive X-ray analysis revealed the existence of a GaO x interlayer between SiO 2 and GaN. The unintentionally formed interlayer could be one of the reasons for the improvement of interface properties at ALD-SiO 2 /GaN." @default.
• W4210722141 created "2022-02-08" @default.
• W4210722141 creator A5022243056 @default.
• W4210722141 creator A5027649867 @default.
• W4210722141 creator A5059256313 @default.
• W4210722141 creator A5069176223 @default.
• W4210722141 date "2022-03-21" @default.
• W4210722141 modified "2023-10-11" @default.
• W4210722141 title "SiO₂/GaN interfaces with low defect densities and high breakdown electric fields formed by plasma-enhanced atomic layer deposition" @default.
• W4210722141 cites W1669917242 @default.
• W4210722141 cites W1973561324 @default.
• W4210722141 cites W1974856246 @default.
• W4210722141 cites W1974865919 @default.
• W4210722141 cites W1979877963 @default.
• W4210722141 cites W1980584607 @default.
• W4210722141 cites W1986651112 @default.
• W4210722141 cites W1987054511 @default.
• W4210722141 cites W1990600621 @default.
• W4210722141 cites W2002765787 @default.
• W4210722141 cites W2003258254 @default.
• W4210722141 cites W2015532159 @default.
• W4210722141 cites W2015946986 @default.
• W4210722141 cites W2016220599 @default.
• W4210722141 cites W2019410103 @default.
• W4210722141 cites W2043519365 @default.
• W4210722141 cites W2078477261 @default.
• W4210722141 cites W2090390568 @default.
• W4210722141 cites W2167950345 @default.
• W4210722141 cites W2182409481 @default.
• W4210722141 cites W2329138937 @default.
• W4210722141 cites W2576122166 @default.
• W4210722141 cites W2726649019 @default.
• W4210722141 cites W2753460681 @default.
• W4210722141 cites W2755658972 @default.
• W4210722141 cites W2766265975 @default.
• W4210722141 cites W2770014813 @default.
• W4210722141 cites W2776394389 @default.
• W4210722141 cites W2782673199 @default.
• W4210722141 cites W2791691309 @default.
• W4210722141 cites W2792741901 @default.
• W4210722141 cites W2899024382 @default.
• W4210722141 cites W2943605499 @default.
• W4210722141 cites W2998389518 @default.
• W4210722141 cites W3041932450 @default.
• W4210722141 doi "https://doi.org/10.35848/1347-4065/ac4f79" @default.
• W4210722141 hasPublicationYear "2022" @default.
• W4210722141 type Work @default.
• W4210722141 citedByCount "8" @default.
• W4210722141 countsByYear W42107221412022 @default.
• W4210722141 countsByYear W42107221412023 @default.
• W4210722141 crossrefType "journal-article" @default.
• W4210722141 hasAuthorship W4210722141A5022243056 @default.
• W4210722141 hasAuthorship W4210722141A5027649867 @default.
• W4210722141 hasAuthorship W4210722141A5059256313 @default.
• W4210722141 hasAuthorship W4210722141A5069176223 @default.
• W4210722141 hasBestOaLocation W42107221411 @default.
• W4210722141 hasConcept C113196181 @default.
• W4210722141 hasConcept C121332964 @default.
• W4210722141 hasConcept C121932024 @default.
• W4210722141 hasConcept C133386390 @default.
• W4210722141 hasConcept C146088050 @default.
• W4210722141 hasConcept C159985019 @default.
• W4210722141 hasConcept C171250308 @default.
• W4210722141 hasConcept C185592680 @default.
• W4210722141 hasConcept C19067145 @default.
• W4210722141 hasConcept C192562407 @default.
• W4210722141 hasConcept C26873012 @default.
• W4210722141 hasConcept C2777855556 @default.
• W4210722141 hasConcept C2778024649 @default.
• W4210722141 hasConcept C43617362 @default.
• W4210722141 hasConcept C49040817 @default.
• W4210722141 hasConcept C60799052 @default.
• W4210722141 hasConcept C62520636 @default.
• W4210722141 hasConcept C69544855 @default.
• W4210722141 hasConcept C82706917 @default.
• W4210722141 hasConceptScore W4210722141C113196181 @default.
• W4210722141 hasConceptScore W4210722141C121332964 @default.
• W4210722141 hasConceptScore W4210722141C121932024 @default.
• W4210722141 hasConceptScore W4210722141C133386390 @default.
• W4210722141 hasConceptScore W4210722141C146088050 @default.
• W4210722141 hasConceptScore W4210722141C159985019 @default.
• W4210722141 hasConceptScore W4210722141C171250308 @default.
• W4210722141 hasConceptScore W4210722141C185592680 @default.
• W4210722141 hasConceptScore W4210722141C19067145 @default.
• W4210722141 hasConceptScore W4210722141C192562407 @default.
• W4210722141 hasConceptScore W4210722141C26873012 @default.
• W4210722141 hasConceptScore W4210722141C2777855556 @default.
• W4210722141 hasConceptScore W4210722141C2778024649 @default.
• W4210722141 hasConceptScore W4210722141C43617362 @default.
• W4210722141 hasConceptScore W4210722141C49040817 @default.
• W4210722141 hasConceptScore W4210722141C60799052 @default.
• W4210722141 hasConceptScore W4210722141C62520636 @default.
• W4210722141 hasConceptScore W4210722141C69544855 @default.
• W4210722141 hasConceptScore W4210722141C82706917 @default.
• W4210722141 hasIssue "SC" @default.
• W4210722141 hasLocation W42107221411 @default.
• W4210722141 hasOpenAccess W4210722141 @default.
• W4210722141 hasPrimaryLocation W42107221411 @default.

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