Matches in SemOpenAlex for { <https://semopenalex.org/work/W4210731691> ?p ?o ?g. }
- W4210731691 endingPage "013013" @default.
- W4210731691 startingPage "013013" @default.
- W4210731691 abstract "A silicon oxyfluoride layer was deposited on a-Si samples using SiF 4 /O 2 plasma at different temperatures between −100°C and −40 °C. In situ X-ray photoelectron spectroscopy measurements were then performed to characterize the deposited layer. The sample was then brought back to room temperature and analyzed again. It has been shown that a temperature below −65 °C is needed to significantly enhance the physisorption of SiF x species. Hence, in this condition, a F-rich oxyfluoride layer, stable at low temperature only, is physisorbed. Above this threshold temperature, the native silicon oxide layer is fluorinated and the proportion of O in the deposited layer is higher and remains stable even when the sample is brought back to room temperature." @default.
- W4210731691 created "2022-02-08" @default.
- W4210731691 creator A5044301016 @default.
- W4210731691 creator A5045089827 @default.
- W4210731691 creator A5046841674 @default.
- W4210731691 creator A5053679599 @default.
- W4210731691 creator A5059981509 @default.
- W4210731691 creator A5085502348 @default.
- W4210731691 creator A5089415152 @default.
- W4210731691 creator A5089985535 @default.
- W4210731691 date "2022-01-01" @default.
- W4210731691 modified "2023-10-18" @default.
- W4210731691 title "Quasi In Situ XPS on a SiO<sub>x</sub>F<sub>y</sub> Layer Deposited on Silicon by a Cryogenic Process" @default.
- W4210731691 cites W1488956189 @default.
- W4210731691 cites W1506673119 @default.
- W4210731691 cites W1621375528 @default.
- W4210731691 cites W1671492068 @default.
- W4210731691 cites W1974487914 @default.
- W4210731691 cites W1976268392 @default.
- W4210731691 cites W1984277026 @default.
- W4210731691 cites W1997994315 @default.
- W4210731691 cites W2001920646 @default.
- W4210731691 cites W2011740898 @default.
- W4210731691 cites W2012194059 @default.
- W4210731691 cites W2016952052 @default.
- W4210731691 cites W2017062950 @default.
- W4210731691 cites W2025698258 @default.
- W4210731691 cites W2026235582 @default.
- W4210731691 cites W2034633699 @default.
- W4210731691 cites W2042838948 @default.
- W4210731691 cites W2045553774 @default.
- W4210731691 cites W2046305916 @default.
- W4210731691 cites W2048408746 @default.
- W4210731691 cites W2060709170 @default.
- W4210731691 cites W2061430937 @default.
- W4210731691 cites W2072602972 @default.
- W4210731691 cites W2074340549 @default.
- W4210731691 cites W2079605327 @default.
- W4210731691 cites W2082968678 @default.
- W4210731691 cites W2083665072 @default.
- W4210731691 cites W2094635269 @default.
- W4210731691 cites W2129158702 @default.
- W4210731691 cites W2223905640 @default.
- W4210731691 cites W2317874326 @default.
- W4210731691 cites W2330333580 @default.
- W4210731691 cites W2586524217 @default.
- W4210731691 cites W2946134045 @default.
- W4210731691 cites W2971511043 @default.
- W4210731691 cites W3011274142 @default.
- W4210731691 doi "https://doi.org/10.1149/2162-8777/ac4c7d" @default.
- W4210731691 hasPublicationYear "2022" @default.
- W4210731691 type Work @default.
- W4210731691 citedByCount "2" @default.
- W4210731691 countsByYear W42107316912022 @default.
- W4210731691 countsByYear W42107316912023 @default.
- W4210731691 crossrefType "journal-article" @default.
- W4210731691 hasAuthorship W4210731691A5044301016 @default.
- W4210731691 hasAuthorship W4210731691A5045089827 @default.
- W4210731691 hasAuthorship W4210731691A5046841674 @default.
- W4210731691 hasAuthorship W4210731691A5053679599 @default.
- W4210731691 hasAuthorship W4210731691A5059981509 @default.
- W4210731691 hasAuthorship W4210731691A5085502348 @default.
- W4210731691 hasAuthorship W4210731691A5089415152 @default.
- W4210731691 hasAuthorship W4210731691A5089985535 @default.
- W4210731691 hasBestOaLocation W42107316912 @default.
- W4210731691 hasConcept C113196181 @default.
- W4210731691 hasConcept C127413603 @default.
- W4210731691 hasConcept C147789679 @default.
- W4210731691 hasConcept C150394285 @default.
- W4210731691 hasConcept C171250308 @default.
- W4210731691 hasConcept C175708663 @default.
- W4210731691 hasConcept C178790620 @default.
- W4210731691 hasConcept C185592680 @default.
- W4210731691 hasConcept C191897082 @default.
- W4210731691 hasConcept C192562407 @default.
- W4210731691 hasConcept C2777431650 @default.
- W4210731691 hasConcept C2777822432 @default.
- W4210731691 hasConcept C2779105228 @default.
- W4210731691 hasConcept C2779227376 @default.
- W4210731691 hasConcept C2779851234 @default.
- W4210731691 hasConcept C2780050857 @default.
- W4210731691 hasConcept C42360764 @default.
- W4210731691 hasConcept C43617362 @default.
- W4210731691 hasConcept C49040817 @default.
- W4210731691 hasConcept C544956773 @default.
- W4210731691 hasConceptScore W4210731691C113196181 @default.
- W4210731691 hasConceptScore W4210731691C127413603 @default.
- W4210731691 hasConceptScore W4210731691C147789679 @default.
- W4210731691 hasConceptScore W4210731691C150394285 @default.
- W4210731691 hasConceptScore W4210731691C171250308 @default.
- W4210731691 hasConceptScore W4210731691C175708663 @default.
- W4210731691 hasConceptScore W4210731691C178790620 @default.
- W4210731691 hasConceptScore W4210731691C185592680 @default.
- W4210731691 hasConceptScore W4210731691C191897082 @default.
- W4210731691 hasConceptScore W4210731691C192562407 @default.
- W4210731691 hasConceptScore W4210731691C2777431650 @default.
- W4210731691 hasConceptScore W4210731691C2777822432 @default.
- W4210731691 hasConceptScore W4210731691C2779105228 @default.