Matches in SemOpenAlex for { <https://semopenalex.org/work/W4210889589> ?p ?o ?g. }
- W4210889589 abstract "The quest for lowering energy consumption during thin film growth, as by magnetron sputtering, becomes of particular importance in view of sustainable development goals. A recently proposed solution combining high power impulse and direct current magnetron sputtering (HiPIMS/DCMS) relies on the use of heavy metal-ion irradiation, instead of conventionally employed resistive heating, to provide sufficient adatom mobility, in order to obtain high-quality dense films. The major fraction of process energy is used at the sputtering sources rather than for heating the entire vacuum vessel. The present study aims to investigate the W+ densification effects as a function of increasing Al content in (Ti1-yAly)1-xWxN films covering the entire range up to the practical solubility limits (y ~ 0.67). Layers with high Al content are attractive to industrial applications as the high temperature oxidation resistance increases with increasing Al concentration. The challenge is, however, to avoid precipitation of the hexagonal wurtzite AlN phase, which is softer. We report here that (Ti1-yAly)1-xWxN layers with y = 0.66 and x = 0.05 grown by a combination of W-HiPIMS and TiAl-DCMS with the substrate bias Vs synchronized to the W+-rich fluxes (to provide mobility in the absence of substrate heating) possess single-phase NaCl-structure, as confirmed by XRD and SAED patterns. The evidence provided by XTEM images and the residual oxygen content obtained from ERDA analyses reveals that the alloy films are dense without discernable porosity. The nanoindentation hardness is comparable to that of TiAlN films grown at 400-500 °C, while the residual stresses are very low. We established that the adatom mobility due to the heavy ion W+ irradiation (in place of resistive heating) enables the growth of high-quality coatings at substrate temperatures not exceeding 130 °C provided that the W+ momentum transfer per deposited metal atom is sufficiently high. The benefit of this novel film growth approach is not only the reduction of the process energy consumption by 83%, but also the possibility to coat temperature-sensitive substrates." @default.
- W4210889589 created "2022-02-09" @default.
- W4210889589 creator A5008411200 @default.
- W4210889589 creator A5010177657 @default.
- W4210889589 creator A5019592236 @default.
- W4210889589 creator A5048978284 @default.
- W4210889589 creator A5059039362 @default.
- W4210889589 creator A5069610590 @default.
- W4210889589 date "2022-02-09" @default.
- W4210889589 modified "2023-10-18" @default.
- W4210889589 title "Dense, single-phase, hard, and stress-free Ti0.32Al0.63W0.05N films grown by magnetron sputtering with dramatically reduced energy consumption" @default.
- W4210889589 cites W1499121024 @default.
- W4210889589 cites W1581507047 @default.
- W4210889589 cites W1971936954 @default.
- W4210889589 cites W1981966175 @default.
- W4210889589 cites W1984432337 @default.
- W4210889589 cites W1990103132 @default.
- W4210889589 cites W2013302159 @default.
- W4210889589 cites W2030514611 @default.
- W4210889589 cites W2032016201 @default.
- W4210889589 cites W2047615267 @default.
- W4210889589 cites W2075961554 @default.
- W4210889589 cites W2083476901 @default.
- W4210889589 cites W2089530853 @default.
- W4210889589 cites W2093919240 @default.
- W4210889589 cites W2111062994 @default.
- W4210889589 cites W2146032121 @default.
- W4210889589 cites W2167386044 @default.
- W4210889589 cites W2217173632 @default.
- W4210889589 cites W2592754874 @default.
- W4210889589 cites W2751017974 @default.
- W4210889589 cites W2781609153 @default.
- W4210889589 cites W2799553186 @default.
- W4210889589 cites W2980144607 @default.
- W4210889589 cites W2992718686 @default.
- W4210889589 cites W3001399775 @default.
- W4210889589 cites W3024816056 @default.
- W4210889589 cites W3108676725 @default.
- W4210889589 cites W3109938523 @default.
- W4210889589 cites W3151427484 @default.
- W4210889589 cites W3193693607 @default.
- W4210889589 cites W3201947777 @default.
- W4210889589 doi "https://doi.org/10.1038/s41598-022-05975-5" @default.
- W4210889589 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/35140271" @default.
- W4210889589 hasPublicationYear "2022" @default.
- W4210889589 type Work @default.
- W4210889589 citedByCount "7" @default.
- W4210889589 countsByYear W42108895892022 @default.
- W4210889589 countsByYear W42108895892023 @default.
- W4210889589 crossrefType "journal-article" @default.
- W4210889589 hasAuthorship W4210889589A5008411200 @default.
- W4210889589 hasAuthorship W4210889589A5010177657 @default.
- W4210889589 hasAuthorship W4210889589A5019592236 @default.
- W4210889589 hasAuthorship W4210889589A5048978284 @default.
- W4210889589 hasAuthorship W4210889589A5059039362 @default.
- W4210889589 hasAuthorship W4210889589A5069610590 @default.
- W4210889589 hasBestOaLocation W42108895891 @default.
- W4210889589 hasConcept C159985019 @default.
- W4210889589 hasConcept C171250308 @default.
- W4210889589 hasConcept C19067145 @default.
- W4210889589 hasConcept C191897082 @default.
- W4210889589 hasConcept C192562407 @default.
- W4210889589 hasConcept C22423302 @default.
- W4210889589 hasConcept C2780026712 @default.
- W4210889589 hasConcept C3045981 @default.
- W4210889589 hasConcept C49040817 @default.
- W4210889589 hasConcept C49326732 @default.
- W4210889589 hasConcept C535196362 @default.
- W4210889589 hasConcept C61427134 @default.
- W4210889589 hasConcept C97892325 @default.
- W4210889589 hasConceptScore W4210889589C159985019 @default.
- W4210889589 hasConceptScore W4210889589C171250308 @default.
- W4210889589 hasConceptScore W4210889589C19067145 @default.
- W4210889589 hasConceptScore W4210889589C191897082 @default.
- W4210889589 hasConceptScore W4210889589C192562407 @default.
- W4210889589 hasConceptScore W4210889589C22423302 @default.
- W4210889589 hasConceptScore W4210889589C2780026712 @default.
- W4210889589 hasConceptScore W4210889589C3045981 @default.
- W4210889589 hasConceptScore W4210889589C49040817 @default.
- W4210889589 hasConceptScore W4210889589C49326732 @default.
- W4210889589 hasConceptScore W4210889589C535196362 @default.
- W4210889589 hasConceptScore W4210889589C61427134 @default.
- W4210889589 hasConceptScore W4210889589C97892325 @default.
- W4210889589 hasFunder F4320321030 @default.
- W4210889589 hasFunder F4320321501 @default.
- W4210889589 hasFunder F4320322225 @default.
- W4210889589 hasFunder F4320322327 @default.
- W4210889589 hasFunder F4320322581 @default.
- W4210889589 hasFunder F4320322711 @default.
- W4210889589 hasIssue "1" @default.
- W4210889589 hasLocation W42108895891 @default.
- W4210889589 hasLocation W42108895892 @default.
- W4210889589 hasLocation W42108895893 @default.
- W4210889589 hasLocation W42108895894 @default.
- W4210889589 hasLocation W42108895895 @default.
- W4210889589 hasOpenAccess W4210889589 @default.
- W4210889589 hasPrimaryLocation W42108895891 @default.
- W4210889589 hasRelatedWork W1968373997 @default.
- W4210889589 hasRelatedWork W2029355201 @default.
- W4210889589 hasRelatedWork W2082577004 @default.