Matches in SemOpenAlex for { <https://semopenalex.org/work/W4211163270> ?p ?o ?g. }
- W4211163270 abstract "Abstract An introduction to the chemistry and applications of lithographic resists is presented. The historical development of these materials is reviewed, the characteristics of resists with current technological importance are described, and a view of anticipated future developments in the field is offered." @default.
- W4211163270 created "2022-02-13" @default.
- W4211163270 creator A5024710133 @default.
- W4211163270 creator A5042982993 @default.
- W4211163270 date "2005-06-17" @default.
- W4211163270 modified "2023-10-14" @default.
- W4211163270 title "Lithographic Resists" @default.
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