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- W4211223823 abstract "This paper reports, for the first time, on an intrinsically tunable scandium aluminum nitride (Sc <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.28</inf> Al <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.72</inf> N) width-extensional resonator based on local polarization switching concept. The resonator is created from alternative stacking of two ferroelectric Sc <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.28</inf> Al <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.72</inf> N films with laminated metal layers. This architecture enables independent control over local polarization across transducer thickness and width. Local polarization reversal of the top Sc <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.28</inf> Al <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0</inf> . <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>72</inf> N film, through application of switching pulses between top and middle electrodes, results in a reduction in net polarization and electromechanical coupling. This translates to the stiffening of the transducer and increases the acoustic velocity, which results in a higher resonance frequency. Here, the local polarization switching concept is demonstrated using a 97 MHz laminated ferroelectric Sc <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.28</inf> Al <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0</inf> . <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>72</inf> N resonator operating in its 3 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>rd</sup> width-extensional mode, with a Q of 687 and a k <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>t</inf> <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> of 2.26%. A frequency tuning of 0.65% is achieved, without any degradation in Q, through application of fifteen ~78.5V monopolar pulses with a frequency of 20kHz. This tuning range exceeds the overall 0.53% temperature-induced frequency drift in the resonator over -40°C to 80°C range. This highlights the effectiveness of the local polarization switching approach for temperature stabilization of Sc <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.28</inf> Al <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0</inf> . <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>72</inf> N bulk acoustic resonators used in integrated radio-frequency oscillators and spectral processors." @default.
- W4211223823 created "2022-02-13" @default.
- W4211223823 creator A5036428386 @default.
- W4211223823 creator A5039411044 @default.
- W4211223823 creator A5050179255 @default.
- W4211223823 creator A5070132520 @default.
- W4211223823 date "2022-01-09" @default.
- W4211223823 modified "2023-10-16" @default.
- W4211223823 title "Intrinsically Tunable Laminated Ferroelectric Scandium Aluminum Nitride Extensional Resonator Based on Local Polarization Switching" @default.
- W4211223823 cites W1997022544 @default.
- W4211223823 cites W2044761720 @default.
- W4211223823 cites W2061088676 @default.
- W4211223823 cites W2115908410 @default.
- W4211223823 cites W248437204 @default.
- W4211223823 cites W2896704624 @default.
- W4211223823 cites W2996705029 @default.
- W4211223823 cites W3153614988 @default.
- W4211223823 cites W3161355430 @default.
- W4211223823 cites W3162624937 @default.
- W4211223823 doi "https://doi.org/10.1109/mems51670.2022.9699790" @default.
- W4211223823 hasPublicationYear "2022" @default.
- W4211223823 type Work @default.
- W4211223823 citedByCount "7" @default.
- W4211223823 countsByYear W42112238232022 @default.
- W4211223823 countsByYear W42112238232023 @default.
- W4211223823 crossrefType "proceedings-article" @default.
- W4211223823 hasAuthorship W4211223823A5036428386 @default.
- W4211223823 hasAuthorship W4211223823A5039411044 @default.
- W4211223823 hasAuthorship W4211223823A5050179255 @default.
- W4211223823 hasAuthorship W4211223823A5070132520 @default.
- W4211223823 hasConcept C121332964 @default.
- W4211223823 hasConcept C133386390 @default.
- W4211223823 hasConcept C147789679 @default.
- W4211223823 hasConcept C185592680 @default.
- W4211223823 hasConcept C192562407 @default.
- W4211223823 hasConcept C205049153 @default.
- W4211223823 hasConcept C49040817 @default.
- W4211223823 hasConcept C79090758 @default.
- W4211223823 hasConcept C97126364 @default.
- W4211223823 hasConceptScore W4211223823C121332964 @default.
- W4211223823 hasConceptScore W4211223823C133386390 @default.
- W4211223823 hasConceptScore W4211223823C147789679 @default.
- W4211223823 hasConceptScore W4211223823C185592680 @default.
- W4211223823 hasConceptScore W4211223823C192562407 @default.
- W4211223823 hasConceptScore W4211223823C205049153 @default.
- W4211223823 hasConceptScore W4211223823C49040817 @default.
- W4211223823 hasConceptScore W4211223823C79090758 @default.
- W4211223823 hasConceptScore W4211223823C97126364 @default.
- W4211223823 hasFunder F4320332180 @default.
- W4211223823 hasLocation W42112238231 @default.
- W4211223823 hasOpenAccess W4211223823 @default.
- W4211223823 hasPrimaryLocation W42112238231 @default.
- W4211223823 hasRelatedWork W1972216760 @default.
- W4211223823 hasRelatedWork W2010289914 @default.
- W4211223823 hasRelatedWork W2012099480 @default.
- W4211223823 hasRelatedWork W2013402429 @default.
- W4211223823 hasRelatedWork W2081882456 @default.
- W4211223823 hasRelatedWork W2164570383 @default.
- W4211223823 hasRelatedWork W2319275482 @default.
- W4211223823 hasRelatedWork W2346258834 @default.
- W4211223823 hasRelatedWork W4230065958 @default.
- W4211223823 hasRelatedWork W4235949827 @default.
- W4211223823 isParatext "false" @default.
- W4211223823 isRetracted "false" @default.
- W4211223823 workType "article" @default.