Matches in SemOpenAlex for { <https://semopenalex.org/work/W4211240016> ?p ?o ?g. }
Showing items 1 to 52 of
52
with 100 items per page.
- W4211240016 endingPage "245" @default.
- W4211240016 startingPage "243" @default.
- W4211240016 abstract "ANNEALING OF THIN ARSENIC IMPLANTED SILICON LAYERS WITH FLASH GALOGEN LAMP AND RF GAS DISCHARGE was published in EPM ’89: 3rd International Conference on Energy Pulse and Particle Beam Modification of Materials, September 4.–8. 1989, Dresden, GDR on page 243." @default.
- W4211240016 created "2022-02-13" @default.
- W4211240016 creator A5028443121 @default.
- W4211240016 creator A5055839817 @default.
- W4211240016 date "1989-12-31" @default.
- W4211240016 modified "2023-09-26" @default.
- W4211240016 title "ANNEALING OF THIN ARSENIC IMPLANTED SILICON LAYERS WITH FLASH GALOGEN LAMP AND RF GAS DISCHARGE" @default.
- W4211240016 doi "https://doi.org/10.1515/9783112575666-052" @default.
- W4211240016 hasPublicationYear "1989" @default.
- W4211240016 type Work @default.
- W4211240016 citedByCount "0" @default.
- W4211240016 crossrefType "book-chapter" @default.
- W4211240016 hasAuthorship W4211240016A5028443121 @default.
- W4211240016 hasAuthorship W4211240016A5055839817 @default.
- W4211240016 hasConcept C120665830 @default.
- W4211240016 hasConcept C121332964 @default.
- W4211240016 hasConcept C191897082 @default.
- W4211240016 hasConcept C192562407 @default.
- W4211240016 hasConcept C2777472991 @default.
- W4211240016 hasConcept C2777526259 @default.
- W4211240016 hasConcept C2777855556 @default.
- W4211240016 hasConcept C49040817 @default.
- W4211240016 hasConcept C502230775 @default.
- W4211240016 hasConcept C544956773 @default.
- W4211240016 hasConceptScore W4211240016C120665830 @default.
- W4211240016 hasConceptScore W4211240016C121332964 @default.
- W4211240016 hasConceptScore W4211240016C191897082 @default.
- W4211240016 hasConceptScore W4211240016C192562407 @default.
- W4211240016 hasConceptScore W4211240016C2777472991 @default.
- W4211240016 hasConceptScore W4211240016C2777526259 @default.
- W4211240016 hasConceptScore W4211240016C2777855556 @default.
- W4211240016 hasConceptScore W4211240016C49040817 @default.
- W4211240016 hasConceptScore W4211240016C502230775 @default.
- W4211240016 hasConceptScore W4211240016C544956773 @default.
- W4211240016 hasLocation W42112400161 @default.
- W4211240016 hasOpenAccess W4211240016 @default.
- W4211240016 hasPrimaryLocation W42112400161 @default.
- W4211240016 hasRelatedWork W1685982078 @default.
- W4211240016 hasRelatedWork W1990746486 @default.
- W4211240016 hasRelatedWork W2009252896 @default.
- W4211240016 hasRelatedWork W2022507789 @default.
- W4211240016 hasRelatedWork W2046953599 @default.
- W4211240016 hasRelatedWork W2070338356 @default.
- W4211240016 hasRelatedWork W2358205545 @default.
- W4211240016 hasRelatedWork W3004086661 @default.
- W4211240016 hasRelatedWork W4231413117 @default.
- W4211240016 hasRelatedWork W4253328832 @default.
- W4211240016 isParatext "false" @default.
- W4211240016 isRetracted "false" @default.
- W4211240016 workType "book-chapter" @default.