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- W4211244142 endingPage "75" @default.
- W4211244142 startingPage "41" @default.
- W4211244142 abstract "This chapter describes methods to reveal the chemical reactions important in catalytic chemical vapor deposition (Cat-CVD) processes. Many radical species play key roles in the chemical processes in chemical vapor deposition (CVD). In Cat-CVD, source gas molecules are decomposed on hot catalyzer surfaces to produce free radicals. In plasma enhanced chemical vapor deposition (PECVD), radical species are mainly produced by electron bombardment. In the mass spectrometric detection, radical species are ionized, and the ions produced are detected after mass selection. In contrast to mass spectrometric techniques, many photon-in photon-out type laser techniques, such as laser-induced fluorescence (LIF), can be applied in low-vacuum systems, typical in CVD. Vacuum ultraviolet (VUV) laser absorption is one of the most common techniques to evaluate the absolute densities of some atomic species, such as hydrogen and oxygen atoms. Mass spectrometry can also be used to determine the gas-phase composition of stable molecules." @default.
- W4211244142 created "2022-02-13" @default.
- W4211244142 date "2019-02-15" @default.
- W4211244142 modified "2023-10-12" @default.
- W4211244142 title "Fundamentals for Analytical Methods for Revealing Chemical Reactions in<scp>Cat‐CVD</scp>" @default.
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