Matches in SemOpenAlex for { <https://semopenalex.org/work/W4212912005> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W4212912005 endingPage "349" @default.
- W4212912005 startingPage "341" @default.
- W4212912005 abstract "Background: Correct modeling of squeeze-film damping (SFD) is an important consideration in the design of high-Q microresonators. In 2002, using the molecular dynamics (MD) approach, Bao et al. developed an analytical MD model for the evaluation of the SFD of a parallel-plate device in the free molecular regime. Their model was based on the energy exchange between the oscillating plate and gas molecules. Bao’s model is now widely used in microsystem design. However, Bao’s model cannot reduce to the air damping model in free space and is unsuitable for flexible microbeams. Objective: This paper first presents a more accurate analytical model for the evaluation of the SFD of the parallel plate. Then the present analytical model is extended to model the SFD of flexible microbeams with deformed shapes. Methods: This paper is based on the momentum transfer between the vibration plate and gas molecules. Results: The analytical results of the present model have shown a good agreement with the available experimental results. Conclusion: The limitations in the previous model are overcome." @default.
- W4212912005 created "2022-02-24" @default.
- W4212912005 creator A5004033688 @default.
- W4212912005 creator A5020778756 @default.
- W4212912005 creator A5087920560 @default.
- W4212912005 date "2022-12-01" @default.
- W4212912005 modified "2023-10-16" @default.
- W4212912005 title "Squeeze-Film Damping of Microbeam and Microplate Resonators in the Free Molecular Regime" @default.
- W4212912005 cites W1975524436 @default.
- W4212912005 cites W1976379000 @default.
- W4212912005 cites W1987747871 @default.
- W4212912005 cites W1991861038 @default.
- W4212912005 cites W1994179265 @default.
- W4212912005 cites W2006136144 @default.
- W4212912005 cites W2006418156 @default.
- W4212912005 cites W2007446043 @default.
- W4212912005 cites W2034722422 @default.
- W4212912005 cites W2041152887 @default.
- W4212912005 cites W2066088758 @default.
- W4212912005 cites W2069440772 @default.
- W4212912005 cites W2070382774 @default.
- W4212912005 cites W2076286256 @default.
- W4212912005 cites W2081387958 @default.
- W4212912005 cites W2084086645 @default.
- W4212912005 cites W2095294543 @default.
- W4212912005 cites W2102271169 @default.
- W4212912005 cites W2120901645 @default.
- W4212912005 cites W2123410656 @default.
- W4212912005 cites W2964170390 @default.
- W4212912005 doi "https://doi.org/10.2174/1876402914666220221113221" @default.
- W4212912005 hasPublicationYear "2022" @default.
- W4212912005 type Work @default.
- W4212912005 citedByCount "0" @default.
- W4212912005 crossrefType "journal-article" @default.
- W4212912005 hasAuthorship W4212912005A5004033688 @default.
- W4212912005 hasAuthorship W4212912005A5020778756 @default.
- W4212912005 hasAuthorship W4212912005A5087920560 @default.
- W4212912005 hasConcept C120665830 @default.
- W4212912005 hasConcept C121332964 @default.
- W4212912005 hasConcept C127413603 @default.
- W4212912005 hasConcept C151054161 @default.
- W4212912005 hasConcept C171250308 @default.
- W4212912005 hasConcept C192562407 @default.
- W4212912005 hasConcept C198394728 @default.
- W4212912005 hasConcept C24890656 @default.
- W4212912005 hasConcept C2777152588 @default.
- W4212912005 hasConcept C49040817 @default.
- W4212912005 hasConcept C57879066 @default.
- W4212912005 hasConcept C78519656 @default.
- W4212912005 hasConcept C97126364 @default.
- W4212912005 hasConceptScore W4212912005C120665830 @default.
- W4212912005 hasConceptScore W4212912005C121332964 @default.
- W4212912005 hasConceptScore W4212912005C127413603 @default.
- W4212912005 hasConceptScore W4212912005C151054161 @default.
- W4212912005 hasConceptScore W4212912005C171250308 @default.
- W4212912005 hasConceptScore W4212912005C192562407 @default.
- W4212912005 hasConceptScore W4212912005C198394728 @default.
- W4212912005 hasConceptScore W4212912005C24890656 @default.
- W4212912005 hasConceptScore W4212912005C2777152588 @default.
- W4212912005 hasConceptScore W4212912005C49040817 @default.
- W4212912005 hasConceptScore W4212912005C57879066 @default.
- W4212912005 hasConceptScore W4212912005C78519656 @default.
- W4212912005 hasConceptScore W4212912005C97126364 @default.
- W4212912005 hasFunder F4320321001 @default.
- W4212912005 hasIssue "4" @default.
- W4212912005 hasLocation W42129120051 @default.
- W4212912005 hasOpenAccess W4212912005 @default.
- W4212912005 hasPrimaryLocation W42129120051 @default.
- W4212912005 hasRelatedWork W2022023440 @default.
- W4212912005 hasRelatedWork W2050588695 @default.
- W4212912005 hasRelatedWork W2439279154 @default.
- W4212912005 hasRelatedWork W2606574883 @default.
- W4212912005 hasRelatedWork W2800751401 @default.
- W4212912005 hasRelatedWork W2883365992 @default.
- W4212912005 hasRelatedWork W288573929 @default.
- W4212912005 hasRelatedWork W3147018014 @default.
- W4212912005 hasRelatedWork W3164167200 @default.
- W4212912005 hasRelatedWork W4214637304 @default.
- W4212912005 hasVolume "14" @default.
- W4212912005 isParatext "false" @default.
- W4212912005 isRetracted "false" @default.
- W4212912005 workType "article" @default.