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- W4213023450 abstract "Single photon avalanche diodes (SPADs) which are based on impact ionization effect have been widely applied to detect the ultra-weak optical signals. Conventional SPAD devices have a high breakdown voltage due to the undeveloped manufacturing processes, which causes a high power dissipation. This paper proposes a structure of single photon avalanche diode with shallow trench isolation (STI) based on MXIC 0.18 µm complementary metal oxide semiconductor (CMOS) process. A series of simulations performed by Silvaco-Technology Computer Aided Design (TCAD) were done to verify the fundamental working principle about SPAD. The two-dimensional simulation results include the volt-ampere characteristics, darkcurrent, electric field distribution, current path, impact ionization distribution and spectral response curve of the SPAD device. And the simulation results demonstrate that the proposed structure has a low breakdown voltage (11.5 V). The response peak wavelength is 500 nm, which can be applied to detecting the visible light." @default.
- W4213023450 created "2022-02-24" @default.
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- W4213023450 date "2021-12-01" @default.
- W4213023450 modified "2023-10-18" @default.
- W4213023450 title "Analysis and Design of STI-bounded Single Photon Avalanche Diode with Low Breakdown Voltage" @default.
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- W4213023450 doi "https://doi.org/10.1109/iceitsa54226.2021.00016" @default.
- W4213023450 hasPublicationYear "2021" @default.
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