Matches in SemOpenAlex for { <https://semopenalex.org/work/W4213302888> ?p ?o ?g. }
- W4213302888 endingPage "139138" @default.
- W4213302888 startingPage "139138" @default.
- W4213302888 abstract "We designed a method to fabricate highly transparent (optical loss < 0.5%), moisture-impermeable high-density Al 2 O 3 moisture-barrier layers using a multiple oxidation process (MOP) of partially coated Al layers. The effectiveness of the moisture barrier was evaluated by measuring the variations in sheet resistance of underlying Cu layers as a function of time at a fixed temperature of 85 °C and a relative humidity of 85%. No resistance variations were observed with the 5-nm-thick Al 2 O 3 layer formed by the proposed method, whereas a considerable resistance increase was displayed by the Al 2 O 3 layer of equal thickness prepared following the conventional deposition methods such as sputtering an elemental Al 2 O 3 target and reactive sputtering. We formed the MOP-Al 2 O 3 layers on a ZnO/Cu/ZnO transparent heater, which validated the improved visible transparency as well as the excellent heater stability at temperatures beyond 100 °C." @default.
- W4213302888 created "2022-02-24" @default.
- W4213302888 creator A5039053127 @default.
- W4213302888 creator A5054481481 @default.
- W4213302888 date "2022-03-01" @default.
- W4213302888 modified "2023-10-05" @default.
- W4213302888 title "Highly impermeable Al2O3 moisture barriers prepared by multiple plasma oxidation of discontinuous aluminum layers for optoelectronic devices" @default.
- W4213302888 cites W1967923189 @default.
- W4213302888 cites W1981017404 @default.
- W4213302888 cites W1983911872 @default.
- W4213302888 cites W1985410291 @default.
- W4213302888 cites W1997411704 @default.
- W4213302888 cites W1997704847 @default.
- W4213302888 cites W2002589958 @default.
- W4213302888 cites W2020823358 @default.
- W4213302888 cites W2028071180 @default.
- W4213302888 cites W2029777497 @default.
- W4213302888 cites W2038923642 @default.
- W4213302888 cites W2056064372 @default.
- W4213302888 cites W2063068072 @default.
- W4213302888 cites W2070601273 @default.
- W4213302888 cites W2073623040 @default.
- W4213302888 cites W2086710447 @default.
- W4213302888 cites W2151759051 @default.
- W4213302888 cites W2156198308 @default.
- W4213302888 cites W2266292335 @default.
- W4213302888 cites W2352990272 @default.
- W4213302888 cites W2515448813 @default.
- W4213302888 cites W2523406688 @default.
- W4213302888 cites W2541181779 @default.
- W4213302888 cites W2559871476 @default.
- W4213302888 cites W2585728048 @default.
- W4213302888 cites W2740550753 @default.
- W4213302888 cites W2744870274 @default.
- W4213302888 cites W2756782509 @default.
- W4213302888 cites W2791879701 @default.
- W4213302888 cites W2883560863 @default.
- W4213302888 cites W2889566734 @default.
- W4213302888 cites W2910866706 @default.
- W4213302888 cites W2913002819 @default.
- W4213302888 cites W3003446293 @default.
- W4213302888 cites W3011267543 @default.
- W4213302888 cites W3079465924 @default.
- W4213302888 cites W3091667025 @default.
- W4213302888 cites W3126597504 @default.
- W4213302888 cites W3157850691 @default.
- W4213302888 cites W3184873623 @default.
- W4213302888 cites W559983093 @default.
- W4213302888 doi "https://doi.org/10.1016/j.tsf.2022.139138" @default.
- W4213302888 hasPublicationYear "2022" @default.
- W4213302888 type Work @default.
- W4213302888 citedByCount "1" @default.
- W4213302888 countsByYear W42133028882023 @default.
- W4213302888 crossrefType "journal-article" @default.
- W4213302888 hasAuthorship W4213302888A5039053127 @default.
- W4213302888 hasAuthorship W4213302888A5054481481 @default.
- W4213302888 hasConcept C113196181 @default.
- W4213302888 hasConcept C121332964 @default.
- W4213302888 hasConcept C127413603 @default.
- W4213302888 hasConcept C151420433 @default.
- W4213302888 hasConcept C151730666 @default.
- W4213302888 hasConcept C158960510 @default.
- W4213302888 hasConcept C159985019 @default.
- W4213302888 hasConcept C171250308 @default.
- W4213302888 hasConcept C176864760 @default.
- W4213302888 hasConcept C185592680 @default.
- W4213302888 hasConcept C19067145 @default.
- W4213302888 hasConcept C192562407 @default.
- W4213302888 hasConcept C22423302 @default.
- W4213302888 hasConcept C2779227376 @default.
- W4213302888 hasConcept C2779833192 @default.
- W4213302888 hasConcept C2816523 @default.
- W4213302888 hasConcept C42360764 @default.
- W4213302888 hasConcept C43617362 @default.
- W4213302888 hasConcept C513153333 @default.
- W4213302888 hasConcept C61427134 @default.
- W4213302888 hasConcept C64297162 @default.
- W4213302888 hasConcept C66825105 @default.
- W4213302888 hasConcept C86803240 @default.
- W4213302888 hasConcept C97355855 @default.
- W4213302888 hasConceptScore W4213302888C113196181 @default.
- W4213302888 hasConceptScore W4213302888C121332964 @default.
- W4213302888 hasConceptScore W4213302888C127413603 @default.
- W4213302888 hasConceptScore W4213302888C151420433 @default.
- W4213302888 hasConceptScore W4213302888C151730666 @default.
- W4213302888 hasConceptScore W4213302888C158960510 @default.
- W4213302888 hasConceptScore W4213302888C159985019 @default.
- W4213302888 hasConceptScore W4213302888C171250308 @default.
- W4213302888 hasConceptScore W4213302888C176864760 @default.
- W4213302888 hasConceptScore W4213302888C185592680 @default.
- W4213302888 hasConceptScore W4213302888C19067145 @default.
- W4213302888 hasConceptScore W4213302888C192562407 @default.
- W4213302888 hasConceptScore W4213302888C22423302 @default.
- W4213302888 hasConceptScore W4213302888C2779227376 @default.
- W4213302888 hasConceptScore W4213302888C2779833192 @default.
- W4213302888 hasConceptScore W4213302888C2816523 @default.
- W4213302888 hasConceptScore W4213302888C42360764 @default.
- W4213302888 hasConceptScore W4213302888C43617362 @default.