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- W4214546719 abstract "Several important processes are involved in the implantation of ions into solids which in turn alter the physical states of the near-surface region. A clear understanding of these processes and the modification in the structure is invaluable for utilizing ion implantation phenomena to engineer surfaces through the controlled modification of surface properties. In this chapter, the fundamental understanding of the ion beam implantation technique is developed in detail." @default.
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- W4214546719 date "2022-01-01" @default.
- W4214546719 modified "2023-10-14" @default.
- W4214546719 title "Low Energy Ion Implantation" @default.
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- W4214546719 doi "https://doi.org/10.1007/978-3-030-93862-8_3" @default.
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