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- W4214919482 abstract "High power density VCSELs are attracting attentions in the field of LiDAR applications. Multi-junction VCSEL is the key technology to obtain high power density. High slope efficiency, high filling factor and small divergence angle are the straight-forward research directions to realize this high performance multi-junction VCSEL array. We optimize the epitaxial design and fabrication process, such as tunnel junction, oxidation layer and array layout. The progress on high performance multi-junction VCSEL array emitting around 940 nm is reported. Selectively oxidized, top-emitting VCSEL emitter array with 59.7% power conversion efficiency and slope efficiency of 8.3 W/A are developed as the basic laser source targeting at the LiDAR applications. The fabricated VCSEL array devices with emitting area of 234*250 um<sup>2</sup> exhibit power density higher than 1800 W/mm<sup>2</sup> and divergence angle lower than 21 degree (1/e<sup>2</sup>) with 15A peak current, 10kHz 10 nano-second pulsed (FWHM) driver." @default.
- W4214919482 created "2022-03-05" @default.
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- W4214919482 date "2022-03-03" @default.
- W4214919482 modified "2023-10-16" @default.
- W4214919482 title "High performance multi-junction VCSELs for LiDAR applications" @default.
- W4214919482 doi "https://doi.org/10.1117/12.2609601" @default.
- W4214919482 hasPublicationYear "2022" @default.
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