FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W42203742> ?p ?o ?g. }

• W42203742 endingPage "227" @default.
• W42203742 startingPage "199" @default.
• W42203742 abstract "Knowledge of the transport of sputtered particles through the gas phase is not only a fundamental research topic, but also of main interest to know the properties of the arriving metal flux at the substrate or chamber walls as a function of the deposition geometry and deposition conditions. Characterisation or modelling of this metal flux is, e.g. of interest when a high thickness uniformity is needed [1], when complex substrates are to be deposited [2], or when the thin film composition has to be controlled [3]. However, not only the amount of arriving metallic particles has to be controlled, but also their direction and impact energy are influencing the final properties of the deposited thin films. Although some attempts have been done, characterisation of the incoming direction [4] or the energy [5] of metal particles experimentally is difficult to carry out. A better attempt is to simulate the transport of the sputtered particles, and to verify the simulation code by the experimental much more accessible deposition profile [6]. An overview of the simulation of the transport of the sputtered particles through the gas phase is given in this article. Section 6.2 describes the place wherefrom the sputtered particles leave the target. Section 6.3 discusses the different ways to describe the initial energy and direction of the sputtered particles, when leaving the target. In Sect. 6.4, the mean free path, and thus the distance to a collision with the background gas, is discussed. Also the collision and the interaction potential needed to describe the collision are treated in Sect. 6.4. Section 6.5 briefly discusses the possible ways to include the effect of gas rarefaction. Finally, in Sect. 6.6 a concrete simulation model is described and some typical results are shown." @default.
• W42203742 created "2016-06-24" @default.
• W42203742 creator A5000501132 @default.
• W42203742 creator A5044276333 @default.
• W42203742 creator A5078002348 @default.
• W42203742 date "2008-01-01" @default.
• W42203742 modified "2023-09-25" @default.
• W42203742 title "Transport of Sputtered Particles Through the Gas Phase" @default.
• W42203742 cites W1963692502 @default.
• W42203742 cites W1964179407 @default.
• W42203742 cites W1967043401 @default.
• W42203742 cites W1968607708 @default.
• W42203742 cites W1968617373 @default.
• W42203742 cites W1970115806 @default.
• W42203742 cites W1972326420 @default.
• W42203742 cites W1974122962 @default.
• W42203742 cites W1974505250 @default.
• W42203742 cites W1977290005 @default.
• W42203742 cites W1978634972 @default.
• W42203742 cites W1981342735 @default.
• W42203742 cites W1982276150 @default.
• W42203742 cites W1983365479 @default.
• W42203742 cites W1983706128 @default.
• W42203742 cites W1984076292 @default.
• W42203742 cites W1987746751 @default.
• W42203742 cites W1988730203 @default.
• W42203742 cites W1988946677 @default.
• W42203742 cites W1990034118 @default.
• W42203742 cites W1992575394 @default.
• W42203742 cites W1994575712 @default.
• W42203742 cites W1996191659 @default.
• W42203742 cites W1996414637 @default.
• W42203742 cites W2000525576 @default.
• W42203742 cites W2002737942 @default.
• W42203742 cites W2002991812 @default.
• W42203742 cites W2004033548 @default.
• W42203742 cites W2004429910 @default.
• W42203742 cites W2008886484 @default.
• W42203742 cites W2008933310 @default.
• W42203742 cites W2009556223 @default.
• W42203742 cites W2012769467 @default.
• W42203742 cites W2013999489 @default.
• W42203742 cites W2017537439 @default.
• W42203742 cites W2018557716 @default.
• W42203742 cites W2019563092 @default.
• W42203742 cites W2019880997 @default.
• W42203742 cites W2023300169 @default.
• W42203742 cites W2025578003 @default.
• W42203742 cites W2029054899 @default.
• W42203742 cites W2037651517 @default.
• W42203742 cites W2037654956 @default.
• W42203742 cites W2037809986 @default.
• W42203742 cites W2043062012 @default.
• W42203742 cites W2047140876 @default.
• W42203742 cites W2047404651 @default.
• W42203742 cites W2053409511 @default.
• W42203742 cites W2055592161 @default.
• W42203742 cites W2060092554 @default.
• W42203742 cites W2060688034 @default.
• W42203742 cites W2061314356 @default.
• W42203742 cites W2062487702 @default.
• W42203742 cites W2062557956 @default.
• W42203742 cites W2063687922 @default.
• W42203742 cites W2064628547 @default.
• W42203742 cites W2064649223 @default.
• W42203742 cites W2064864114 @default.
• W42203742 cites W2064970876 @default.
• W42203742 cites W2067995212 @default.
• W42203742 cites W2076034249 @default.
• W42203742 cites W2077854598 @default.
• W42203742 cites W2078449894 @default.
• W42203742 cites W2078996267 @default.
• W42203742 cites W2083077445 @default.
• W42203742 cites W2083418353 @default.
• W42203742 cites W2085294345 @default.
• W42203742 cites W2085744553 @default.
• W42203742 cites W2085761550 @default.
• W42203742 cites W2085874465 @default.
• W42203742 cites W2088951402 @default.
• W42203742 cites W2089096604 @default.
• W42203742 cites W2092357972 @default.
• W42203742 cites W2094803069 @default.
• W42203742 cites W2099810228 @default.
• W42203742 cites W2129874525 @default.
• W42203742 cites W2149577047 @default.
• W42203742 cites W2913762862 @default.
• W42203742 cites W4230053467 @default.
• W42203742 doi "https://doi.org/10.1007/978-3-540-76664-3_6" @default.
• W42203742 hasPublicationYear "2008" @default.
• W42203742 type Work @default.
• W42203742 sameAs 42203742 @default.
• W42203742 citedByCount "7" @default.
• W42203742 countsByYear W422037422014 @default.
• W42203742 countsByYear W422037422017 @default.
• W42203742 countsByYear W422037422022 @default.
• W42203742 crossrefType "book-chapter" @default.
• W42203742 hasAuthorship W42203742A5000501132 @default.
• W42203742 hasAuthorship W42203742A5044276333 @default.

• next