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• W4220672401 startingPage "109046" @default.
• W4220672401 abstract "Precision motion control of piezo-actuated nanopositioners has attracted considerable attention, due to their wide acceptance in precision engineering. However, several challenging issues, such as hysteresis and creep effects along with mechanical resonances, often lead to a complicated controller design. In this paper, we show that the control strategy can be significantly streamlined by a multimode charge sensing scheme (MCSS). MCSS consists of two different position estimation approaches, namely, inflow charge sensing (ICS) and force induced charge sensing (FICS). Treating piezo-actuated nanopositioner as a standard Hammerstein system, MCSS enables the measurement of intermediate variable, and hence offers a new possibility to divide a challenging control issue into two much easier ones. This is the central idea of the proposed decoupled tracking and damping control (DTDC) strategy. DTDC exhibits several outstanding characteristics, including simple configuration, unconditional stability and wide control bandwidth. Experimental validations on a customized nanopositioner confirm these advantages that MCSS brings to the controller design. Finally, extensive comparative studies demonstrate a good trade- off between control accuracy and complexity of the proposed strategy." @default.
• W4220672401 created "2022-04-03" @default.
• W4220672401 creator A5023785952 @default.
• W4220672401 creator A5086271665 @default.
• W4220672401 date "2022-07-01" @default.
• W4220672401 modified "2023-10-03" @default.
• W4220672401 title "Decoupled tracking and damping control of piezo-actuated nanopositioner enabled by multimode charge sensing" @default.
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• W4220672401 doi "https://doi.org/10.1016/j.ymssp.2022.109046" @default.
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