Matches in SemOpenAlex for { <https://semopenalex.org/work/W4220702000> ?p ?o ?g. }
- W4220702000 endingPage "152938" @default.
- W4220702000 startingPage "152938" @default.
- W4220702000 abstract "The anisotropic nature of plasma etching is usually exploited to realize vertical nano-/micro- silicon structures by deep reactive ion etching. However, some applications require tilted instead of perpendicular profiles with respect to the substrate. Here, a controlled tilted etching is realized by introducing a set of metal electric field modulator(s), which modify the near sample surface potential. The ions from the plasma body are accelerated under the influence of the distorted electric field, and hit the silicon surface with a certain incident angle. A model is built with finite elements method, taking into account the geometry of the experiment and the chamber conditions during the etching process. The thickness and the inter-distance of Al slabs have been varied in a range of 0.5–3 mm and 10–25 mm, respectively. A tilt angle ranging from 0° to 22.6° has been measured and validates the simulation results, showing that a desired tilt profile can be achieved with a proper parameters tuning. Examples of 1D and 2D modulations are reported with linear and chessboard slanted gratings for X-ray imaging applications." @default.
- W4220702000 created "2022-04-03" @default.
- W4220702000 creator A5002647826 @default.
- W4220702000 creator A5003019769 @default.
- W4220702000 creator A5006399818 @default.
- W4220702000 creator A5052841360 @default.
- W4220702000 creator A5090410721 @default.
- W4220702000 date "2022-06-01" @default.
- W4220702000 modified "2023-10-14" @default.
- W4220702000 title "High aspect ratio tilted gratings through local electric field modulation in plasma etching" @default.
- W4220702000 cites W1970819096 @default.
- W4220702000 cites W1972495223 @default.
- W4220702000 cites W1976268392 @default.
- W4220702000 cites W1980750198 @default.
- W4220702000 cites W1984204431 @default.
- W4220702000 cites W1984714952 @default.
- W4220702000 cites W1987856106 @default.
- W4220702000 cites W1997913942 @default.
- W4220702000 cites W1998290008 @default.
- W4220702000 cites W2000167222 @default.
- W4220702000 cites W2000486822 @default.
- W4220702000 cites W2001821898 @default.
- W4220702000 cites W2010644890 @default.
- W4220702000 cites W2016597517 @default.
- W4220702000 cites W2026106646 @default.
- W4220702000 cites W2039830395 @default.
- W4220702000 cites W2058513436 @default.
- W4220702000 cites W2065477051 @default.
- W4220702000 cites W2067055133 @default.
- W4220702000 cites W2084265296 @default.
- W4220702000 cites W2092710685 @default.
- W4220702000 cites W2093466312 @default.
- W4220702000 cites W2126722841 @default.
- W4220702000 cites W2139013117 @default.
- W4220702000 cites W2163377939 @default.
- W4220702000 cites W2287587021 @default.
- W4220702000 cites W2735394108 @default.
- W4220702000 cites W2887548202 @default.
- W4220702000 cites W2940762980 @default.
- W4220702000 cites W2949283486 @default.
- W4220702000 cites W2956780414 @default.
- W4220702000 cites W2969538124 @default.
- W4220702000 cites W3035429051 @default.
- W4220702000 cites W3087336309 @default.
- W4220702000 cites W3088103820 @default.
- W4220702000 cites W3100768455 @default.
- W4220702000 cites W3117188971 @default.
- W4220702000 cites W3127445263 @default.
- W4220702000 cites W3142183500 @default.
- W4220702000 cites W3153699651 @default.
- W4220702000 cites W3159812307 @default.
- W4220702000 cites W3173256819 @default.
- W4220702000 cites W3209992943 @default.
- W4220702000 cites W4379404123 @default.
- W4220702000 doi "https://doi.org/10.1016/j.apsusc.2022.152938" @default.
- W4220702000 hasPublicationYear "2022" @default.
- W4220702000 type Work @default.
- W4220702000 citedByCount "6" @default.
- W4220702000 countsByYear W42207020002022 @default.
- W4220702000 countsByYear W42207020002023 @default.
- W4220702000 crossrefType "journal-article" @default.
- W4220702000 hasAuthorship W4220702000A5002647826 @default.
- W4220702000 hasAuthorship W4220702000A5003019769 @default.
- W4220702000 hasAuthorship W4220702000A5006399818 @default.
- W4220702000 hasAuthorship W4220702000A5052841360 @default.
- W4220702000 hasAuthorship W4220702000A5090410721 @default.
- W4220702000 hasBestOaLocation W42207020001 @default.
- W4220702000 hasConcept C100460472 @default.
- W4220702000 hasConcept C107187091 @default.
- W4220702000 hasConcept C111368507 @default.
- W4220702000 hasConcept C120665830 @default.
- W4220702000 hasConcept C121332964 @default.
- W4220702000 hasConcept C127313418 @default.
- W4220702000 hasConcept C130472188 @default.
- W4220702000 hasConcept C171250308 @default.
- W4220702000 hasConcept C192562407 @default.
- W4220702000 hasConcept C199631012 @default.
- W4220702000 hasConcept C2524010 @default.
- W4220702000 hasConcept C2777289219 @default.
- W4220702000 hasConcept C2779227376 @default.
- W4220702000 hasConcept C2779844322 @default.
- W4220702000 hasConcept C33220542 @default.
- W4220702000 hasConcept C33923547 @default.
- W4220702000 hasConcept C49040817 @default.
- W4220702000 hasConcept C544956773 @default.
- W4220702000 hasConcept C60799052 @default.
- W4220702000 hasConcept C62520636 @default.
- W4220702000 hasConcept C82706917 @default.
- W4220702000 hasConceptScore W4220702000C100460472 @default.
- W4220702000 hasConceptScore W4220702000C107187091 @default.
- W4220702000 hasConceptScore W4220702000C111368507 @default.
- W4220702000 hasConceptScore W4220702000C120665830 @default.
- W4220702000 hasConceptScore W4220702000C121332964 @default.
- W4220702000 hasConceptScore W4220702000C127313418 @default.
- W4220702000 hasConceptScore W4220702000C130472188 @default.
- W4220702000 hasConceptScore W4220702000C171250308 @default.
- W4220702000 hasConceptScore W4220702000C192562407 @default.
- W4220702000 hasConceptScore W4220702000C199631012 @default.