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- W4220708557 abstract "Pulsed laser deposition has evolved into a production technology for growing thin film materials with properties which are challenging to obtain by classical deposition methods such as sputtering or sol-gel deposition. Novel wafer based PLD system technology based on powerful excimer lasers allows universities, institutes and foundries to add 30+ new materials and material systems to their deposition portfolio enabling fabrication e.g. of electro-optical materials, transparent conductive oxides and perovskites. Dielectric, ferroelectric and piezoelectric material depositions can also be performed in any desirable sequence and can run with a single wafer load-lock, cassette handler or integrated with pre-clean station as part of the Solmates cluster platform. Deposition results obtained with the latest 300 mm wafer platform will be discussed." @default.
- W4220708557 created "2022-04-03" @default.
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- W4220708557 date "2022-03-04" @default.
- W4220708557 modified "2023-09-26" @default.
- W4220708557 title "Pulsed laser deposition systems and lasers for pilot and volume production" @default.
- W4220708557 doi "https://doi.org/10.1117/12.2606173" @default.
- W4220708557 hasPublicationYear "2022" @default.
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