Matches in SemOpenAlex for { <https://semopenalex.org/work/W4220785301> ?p ?o ?g. }
- W4220785301 endingPage "128365" @default.
- W4220785301 startingPage "128365" @default.
- W4220785301 abstract "In this work, the SiOx film was deposited on a cylindrical substrate by a radially arranged plasma jet array generated by an AC power supply. The properties of deposited SiOx film were studied systematically, including surface morphology, film thickness, elemental composition and chemical structure. Besides, the effect of surface modification on insulation improvement in a gas insulated transmission line (GIL) system was verified. The discharge uniformity of the plasma jet array was improved by adding ballast resistor in the series circuit. Our results showed that the SiOx films were composed with Si-O-Si group dominated by network structure along with a small amount of Si-OH group and inorganic groups (-CH2, Si-CH3). The film deposited by plasma jet array showed good uniformity on thickness and element composition. The lift-off voltage of metal particle improved by about 120.88% after SiOx film deposition. Our results provide a universal surface modification method for cylindrical substrate under mild conditions." @default.
- W4220785301 created "2022-04-03" @default.
- W4220785301 creator A5014346076 @default.
- W4220785301 creator A5022229662 @default.
- W4220785301 creator A5055850984 @default.
- W4220785301 creator A5060518932 @default.
- W4220785301 creator A5080211715 @default.
- W4220785301 date "2022-05-01" @default.
- W4220785301 modified "2023-10-15" @default.
- W4220785301 title "Uniform deposition of silicon oxide film on cylindrical substrate by radially arranged plasma jet array" @default.
- W4220785301 cites W1832634803 @default.
- W4220785301 cites W1970297356 @default.
- W4220785301 cites W1975737296 @default.
- W4220785301 cites W1980001455 @default.
- W4220785301 cites W1995777198 @default.
- W4220785301 cites W1997593959 @default.
- W4220785301 cites W1998803072 @default.
- W4220785301 cites W2011041385 @default.
- W4220785301 cites W2011733301 @default.
- W4220785301 cites W2016518605 @default.
- W4220785301 cites W2017475432 @default.
- W4220785301 cites W2024541772 @default.
- W4220785301 cites W2024952115 @default.
- W4220785301 cites W2025232938 @default.
- W4220785301 cites W2034420144 @default.
- W4220785301 cites W2049275520 @default.
- W4220785301 cites W2055078269 @default.
- W4220785301 cites W2069717437 @default.
- W4220785301 cites W2080582408 @default.
- W4220785301 cites W2091811066 @default.
- W4220785301 cites W2119677884 @default.
- W4220785301 cites W2121316081 @default.
- W4220785301 cites W2125546336 @default.
- W4220785301 cites W2158516037 @default.
- W4220785301 cites W2173878543 @default.
- W4220785301 cites W2217583542 @default.
- W4220785301 cites W2277608237 @default.
- W4220785301 cites W2277715881 @default.
- W4220785301 cites W2507233002 @default.
- W4220785301 cites W2515001677 @default.
- W4220785301 cites W2597800810 @default.
- W4220785301 cites W2609522902 @default.
- W4220785301 cites W2625360824 @default.
- W4220785301 cites W2746622719 @default.
- W4220785301 cites W2755588103 @default.
- W4220785301 cites W2765232387 @default.
- W4220785301 cites W2769994258 @default.
- W4220785301 cites W2792187838 @default.
- W4220785301 cites W2793856736 @default.
- W4220785301 cites W2803752848 @default.
- W4220785301 cites W2807890924 @default.
- W4220785301 cites W2886502467 @default.
- W4220785301 cites W2889720260 @default.
- W4220785301 cites W2893712358 @default.
- W4220785301 cites W2894643520 @default.
- W4220785301 cites W2898428328 @default.
- W4220785301 cites W2908326958 @default.
- W4220785301 cites W2912212310 @default.
- W4220785301 cites W2915935284 @default.
- W4220785301 cites W2920949820 @default.
- W4220785301 cites W2941920430 @default.
- W4220785301 cites W2949027890 @default.
- W4220785301 cites W2957810333 @default.
- W4220785301 cites W2983638144 @default.
- W4220785301 cites W3000263082 @default.
- W4220785301 cites W3013090990 @default.
- W4220785301 cites W3014566275 @default.
- W4220785301 cites W3025447098 @default.
- W4220785301 cites W3027272286 @default.
- W4220785301 cites W3031529604 @default.
- W4220785301 cites W3109102383 @default.
- W4220785301 cites W3112875999 @default.
- W4220785301 cites W3121857621 @default.
- W4220785301 cites W3170905194 @default.
- W4220785301 cites W3208528303 @default.
- W4220785301 doi "https://doi.org/10.1016/j.surfcoat.2022.128365" @default.
- W4220785301 hasPublicationYear "2022" @default.
- W4220785301 type Work @default.
- W4220785301 citedByCount "7" @default.
- W4220785301 countsByYear W42207853012022 @default.
- W4220785301 countsByYear W42207853012023 @default.
- W4220785301 crossrefType "journal-article" @default.
- W4220785301 hasAuthorship W4220785301A5014346076 @default.
- W4220785301 hasAuthorship W4220785301A5022229662 @default.
- W4220785301 hasAuthorship W4220785301A5055850984 @default.
- W4220785301 hasAuthorship W4220785301A5060518932 @default.
- W4220785301 hasAuthorship W4220785301A5080211715 @default.
- W4220785301 hasConcept C111368507 @default.
- W4220785301 hasConcept C121332964 @default.
- W4220785301 hasConcept C127313418 @default.
- W4220785301 hasConcept C151730666 @default.
- W4220785301 hasConcept C159985019 @default.
- W4220785301 hasConcept C192562407 @default.
- W4220785301 hasConcept C2777289219 @default.
- W4220785301 hasConcept C2777431650 @default.
- W4220785301 hasConcept C2779105228 @default.
- W4220785301 hasConcept C2816523 @default.
- W4220785301 hasConcept C49040817 @default.