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- W4220794088 abstract "In this work, we propose a novel way to flexibly engineer the waveguide dispersion by patterning the cladding of waveguide microresonators. Experimentally, we demonstrate silicon nitride waveguides with air-, oxide-, and SU-8 polymer-cladding layers and compare the corresponding waveguide dispersion. By integrating SU-8 polymer as the outer cladding layer, the waveguide dispersion can be tuned from -143 to -257 ps/nm/km. Through the simple, conventional polymer stripping process, we reconstruct the waveguide dispersion back to that of the original air-cladded device without significantly impacting the quality factor of resonators. This work provides the potential to design the waveguide dispersion in normal and anomalous regimes within an integrated photonic circuit." @default.
- W4220794088 created "2022-04-03" @default.
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- W4220794088 date "2022-03-17" @default.
- W4220794088 modified "2023-10-14" @default.
- W4220794088 title "Dispersion Engineering of Silicon Nitride Microresonators via Reconstructable SU-8 Polymer Cladding" @default.
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- W4220794088 doi "https://doi.org/10.3390/mi13030454" @default.
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