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- W4220809185 abstract "Silicon nanowire field-effect transistors are discussed as biological sensors due to their excellent sensitivity due to the large surface-to-volume ratio and high selectivity with respect to a large number of analytes. A miniature sensor based on a long-channel fin field-effect transistor as a surface charge detector is being investigated. The three-gate configuration offers undeniable advantages over planar devices, since the edges are about a hundred nanometers wide and are characterized by increased conductivity, which leads to higher sensitivity. The characteristics of the transistor are optimized using 3D modeling performed by the computer-aided design software package TCAD, depending on the topological parameters of the transistor and the level of control voltages. Based on the obtained simulation results, a chip was manufactured on a SOI substrate based on self-aligning CMOS-compatible technological processes from top to bottom. It is established that thin structures with a reduced level of doping and low supply power have promising electrical characteristics for an effective approach to scaling a high-resolution pH sensor, which is of particular interest to integrated pH bioanalytics based on CMOS technology." @default.
- W4220809185 created "2022-04-03" @default.
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- W4220809185 date "2022-03-31" @default.
- W4220809185 modified "2023-10-14" @default.
- W4220809185 title "Silicon on isolator ribbon field-effect nanotransistors for high-sensitivity low-power biosensor" @default.
- W4220809185 doi "https://doi.org/10.5614/j.eng.technol.sci.2022.54.2.14" @default.
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