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- W4220846158 abstract "In order to improve the surface shape detection accuracy of large-aperture planar optical elements, the paper studies the key parameters in the conjugate translation difference technology, and proposes a method for selecting the optimal solution of the translation amount. This method first analyzes the theoretical accuracy of the conjugate translation difference technique, and concludes that only under the influence of the difference approximation, the surface shape detection error decreases with the decrease of the translation amount; then, for the inevitable noise factors in the detection process, it establishes The relationship model between the translation amount and the signal-to-noise ratio shows that the smaller the translation amount, the lower the signal-to-noise ratio, the lower the detection accuracy; finally, the value of the translation amount is optimized by considering the above two factors through simulation. The simulation results show that the higher the accuracy of the surface to be measured or the greater the noise of the system, the larger the value of the optimal translation value and the wider the interval of the optimal translation. When the surface accuracy of the measured surface is λ/40, the system When the noise η is 4nm, the surface shape reconstruction error in the best translation interval is better than 0.6nm" @default.
- W4220846158 created "2022-04-03" @default.
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- W4220846158 date "2022-03-27" @default.
- W4220846158 modified "2023-09-27" @default.
- W4220846158 title "Selection and analysis of translation amount of conjugate translation difference surface absolute measurement technology" @default.
- W4220846158 doi "https://doi.org/10.1117/12.2620650" @default.
- W4220846158 hasPublicationYear "2022" @default.
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