Matches in SemOpenAlex for { <https://semopenalex.org/work/W4220888370> ?p ?o ?g. }
- W4220888370 endingPage "1001" @default.
- W4220888370 startingPage "1001" @default.
- W4220888370 abstract "Nanomaterials are widely utilized as sensing materials in semiconductor gas sensors. As sensor sizes continue to shrink, it becomes increasingly challenging to construct micro-scale sensing materials on a micro-sensor with good uniformity and stability. Therefore, in-situ growth with a desired pattern in the tiny sensing area of a microsensor is highly demanded. In this work, we combine area-selective seed layer formation and hydrothermal growth for the in-situ growth of ZnO nanowires (NWs) on Micro-electromechanical Systems (MEMS)-based micro-hotplate gas sensors. The results show that the ZnO NWs are densely grown in the sensing area. With Pd nano-particles’ modification of the ZnO NWs, the sensor is used for hydrogen (H2) detection. The sensors with Pd-ZnO NWs show good repeatability as well as a reversible and uniform response to 2.5 ppm–200 ppm H2. Our approach offers a technical route for designing various kinds of gas sensors." @default.
- W4220888370 created "2022-04-03" @default.
- W4220888370 creator A5016572507 @default.
- W4220888370 creator A5020767880 @default.
- W4220888370 creator A5035701638 @default.
- W4220888370 creator A5037523015 @default.
- W4220888370 creator A5054834061 @default.
- W4220888370 creator A5062751136 @default.
- W4220888370 date "2022-03-18" @default.
- W4220888370 modified "2023-10-17" @default.
- W4220888370 title "Area-Selective, In-Situ Growth of Pd-Modified ZnO Nanowires on MEMS Hydrogen Sensors" @default.
- W4220888370 cites W1998664862 @default.
- W4220888370 cites W1999996302 @default.
- W4220888370 cites W2006866823 @default.
- W4220888370 cites W2012523207 @default.
- W4220888370 cites W2015488368 @default.
- W4220888370 cites W2017993477 @default.
- W4220888370 cites W2035294173 @default.
- W4220888370 cites W2056256311 @default.
- W4220888370 cites W2066598169 @default.
- W4220888370 cites W2071099872 @default.
- W4220888370 cites W2073661454 @default.
- W4220888370 cites W2078674274 @default.
- W4220888370 cites W2081449506 @default.
- W4220888370 cites W2089083535 @default.
- W4220888370 cites W2090861359 @default.
- W4220888370 cites W2103230325 @default.
- W4220888370 cites W2150014238 @default.
- W4220888370 cites W2159589979 @default.
- W4220888370 cites W2174159091 @default.
- W4220888370 cites W2319859551 @default.
- W4220888370 cites W2335636709 @default.
- W4220888370 cites W2408252957 @default.
- W4220888370 cites W2414516666 @default.
- W4220888370 cites W2517186702 @default.
- W4220888370 cites W2740482563 @default.
- W4220888370 cites W2795864003 @default.
- W4220888370 cites W2802382981 @default.
- W4220888370 cites W2971389997 @default.
- W4220888370 cites W3004048417 @default.
- W4220888370 cites W3043477550 @default.
- W4220888370 cites W3046107326 @default.
- W4220888370 cites W3089467997 @default.
- W4220888370 cites W3126984435 @default.
- W4220888370 cites W3159167471 @default.
- W4220888370 cites W3174008960 @default.
- W4220888370 cites W3209258762 @default.
- W4220888370 cites W4200045699 @default.
- W4220888370 doi "https://doi.org/10.3390/nano12061001" @default.
- W4220888370 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/35335814" @default.
- W4220888370 hasPublicationYear "2022" @default.
- W4220888370 type Work @default.
- W4220888370 citedByCount "10" @default.
- W4220888370 countsByYear W42208883702022 @default.
- W4220888370 countsByYear W42208883702023 @default.
- W4220888370 crossrefType "journal-article" @default.
- W4220888370 hasAuthorship W4220888370A5016572507 @default.
- W4220888370 hasAuthorship W4220888370A5020767880 @default.
- W4220888370 hasAuthorship W4220888370A5035701638 @default.
- W4220888370 hasAuthorship W4220888370A5037523015 @default.
- W4220888370 hasAuthorship W4220888370A5054834061 @default.
- W4220888370 hasAuthorship W4220888370A5062751136 @default.
- W4220888370 hasBestOaLocation W42208883701 @default.
- W4220888370 hasConcept C108225325 @default.
- W4220888370 hasConcept C127413603 @default.
- W4220888370 hasConcept C138631740 @default.
- W4220888370 hasConcept C156622251 @default.
- W4220888370 hasConcept C171250308 @default.
- W4220888370 hasConcept C178790620 @default.
- W4220888370 hasConcept C185592680 @default.
- W4220888370 hasConcept C192562407 @default.
- W4220888370 hasConcept C2777822432 @default.
- W4220888370 hasConcept C37977207 @default.
- W4220888370 hasConcept C41858301 @default.
- W4220888370 hasConcept C42360764 @default.
- W4220888370 hasConcept C49040817 @default.
- W4220888370 hasConcept C512968161 @default.
- W4220888370 hasConcept C74214498 @default.
- W4220888370 hasConceptScore W4220888370C108225325 @default.
- W4220888370 hasConceptScore W4220888370C127413603 @default.
- W4220888370 hasConceptScore W4220888370C138631740 @default.
- W4220888370 hasConceptScore W4220888370C156622251 @default.
- W4220888370 hasConceptScore W4220888370C171250308 @default.
- W4220888370 hasConceptScore W4220888370C178790620 @default.
- W4220888370 hasConceptScore W4220888370C185592680 @default.
- W4220888370 hasConceptScore W4220888370C192562407 @default.
- W4220888370 hasConceptScore W4220888370C2777822432 @default.
- W4220888370 hasConceptScore W4220888370C37977207 @default.
- W4220888370 hasConceptScore W4220888370C41858301 @default.
- W4220888370 hasConceptScore W4220888370C42360764 @default.
- W4220888370 hasConceptScore W4220888370C49040817 @default.
- W4220888370 hasConceptScore W4220888370C512968161 @default.
- W4220888370 hasConceptScore W4220888370C74214498 @default.
- W4220888370 hasFunder F4320321001 @default.
- W4220888370 hasFunder F4320335777 @default.
- W4220888370 hasIssue "6" @default.
- W4220888370 hasLocation W42208883701 @default.
- W4220888370 hasLocation W42208883702 @default.