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- W4220975878 abstract "Pyroelectric detectors are widely used thermal infrared detectors due to their simple construction, robustness, and excellent performance. Most pyroelectric devices are based on monocrystalline lithium tantalate (LT) or pyroelectric lead zirconate titanate (PZT) thin films deposited on silicon (Si) substrate. In comparison, recently discovered pyroelectric doped hafnium oxide (HfO<sub>2</sub>) offers the possibility to manufacture completely CMOS-compatible devices on large silicon wafers. Three-dimensional substrates with trench structures were applied for detectors to multiply the pyroelectric current responsivity of a thin, doped hafnium oxide layer deposited by atomic layer deposition. Micromechanical structuring of the 6” silicon wafers was used to improve the thermal conversion and effective plasmonic absorbers for the spectral range 3 - 5 μm. An effective pyrocoefficient up to 1300 μC/m²/K was measured, depending on various dopants (Si, Al, La), layer thicknesses and polarization conditions. A high infrared light absorption > 80% of the plasmonic absorber in the relevant spectral range was determined using FTIR reflection measurements. The performance of the sensor element has been evaluated with a conventional analog transimpedance amplifier with a feedback resistance of 5 GΩ. A specific detectivity D* > 1 ∙ 10<sup>7</sup> cm√Hz/W (black body 1000 K, 3 - 5 μm) was measured for the frequency range 1 - 10 Hz. Additionally, a new application-specific integrated circuit (ASIC) was used for the electrical signal conditioning to realize the first fully CMOS-compatible pyroelectric detector. This detector offers a flexible configuration, digital communication interface and achieves a similar signal-to-noise performance as the analog detectors." @default.
- W4220975878 created "2022-04-03" @default.
- W4220975878 creator A5005521263 @default.
- W4220975878 creator A5010092774 @default.
- W4220975878 creator A5025510345 @default.
- W4220975878 creator A5029349941 @default.
- W4220975878 creator A5036553235 @default.
- W4220975878 creator A5052934567 @default.
- W4220975878 creator A5065359288 @default.
- W4220975878 creator A5069529125 @default.
- W4220975878 creator A5073904645 @default.
- W4220975878 creator A5075564852 @default.
- W4220975878 date "2022-03-05" @default.
- W4220975878 modified "2023-10-03" @default.
- W4220975878 title "Fully CMOS-compatible pyroelectric infrared detector based on doped HfO2 thin film in 3D-integration" @default.
- W4220975878 cites W1978389304 @default.
- W4220975878 cites W2067212245 @default.
- W4220975878 cites W2092582752 @default.
- W4220975878 cites W2793185511 @default.
- W4220975878 doi "https://doi.org/10.1117/12.2607271" @default.
- W4220975878 hasPublicationYear "2022" @default.
- W4220975878 type Work @default.
- W4220975878 citedByCount "3" @default.
- W4220975878 countsByYear W42209758782022 @default.
- W4220975878 countsByYear W42209758782023 @default.
- W4220975878 crossrefType "proceedings-article" @default.
- W4220975878 hasAuthorship W4220975878A5005521263 @default.
- W4220975878 hasAuthorship W4220975878A5010092774 @default.
- W4220975878 hasAuthorship W4220975878A5025510345 @default.
- W4220975878 hasAuthorship W4220975878A5029349941 @default.
- W4220975878 hasAuthorship W4220975878A5036553235 @default.
- W4220975878 hasAuthorship W4220975878A5052934567 @default.
- W4220975878 hasAuthorship W4220975878A5065359288 @default.
- W4220975878 hasAuthorship W4220975878A5069529125 @default.
- W4220975878 hasAuthorship W4220975878A5073904645 @default.
- W4220975878 hasAuthorship W4220975878A5075564852 @default.
- W4220975878 hasConcept C133386390 @default.
- W4220975878 hasConcept C178889773 @default.
- W4220975878 hasConcept C182762160 @default.
- W4220975878 hasConcept C192562407 @default.
- W4220975878 hasConcept C23125352 @default.
- W4220975878 hasConcept C2778448536 @default.
- W4220975878 hasConcept C49040817 @default.
- W4220975878 hasConcept C79090758 @default.
- W4220975878 hasConceptScore W4220975878C133386390 @default.
- W4220975878 hasConceptScore W4220975878C178889773 @default.
- W4220975878 hasConceptScore W4220975878C182762160 @default.
- W4220975878 hasConceptScore W4220975878C192562407 @default.
- W4220975878 hasConceptScore W4220975878C23125352 @default.
- W4220975878 hasConceptScore W4220975878C2778448536 @default.
- W4220975878 hasConceptScore W4220975878C49040817 @default.
- W4220975878 hasConceptScore W4220975878C79090758 @default.
- W4220975878 hasLocation W42209758781 @default.
- W4220975878 hasOpenAccess W4220975878 @default.
- W4220975878 hasPrimaryLocation W42209758781 @default.
- W4220975878 hasRelatedWork W1999569828 @default.
- W4220975878 hasRelatedWork W2026390198 @default.
- W4220975878 hasRelatedWork W2040539873 @default.
- W4220975878 hasRelatedWork W2088697095 @default.
- W4220975878 hasRelatedWork W2991008916 @default.
- W4220975878 hasRelatedWork W3096839033 @default.
- W4220975878 hasRelatedWork W3178801352 @default.
- W4220975878 hasRelatedWork W4200364598 @default.
- W4220975878 hasRelatedWork W4224312363 @default.
- W4220975878 hasRelatedWork W830396748 @default.
- W4220975878 isParatext "false" @default.
- W4220975878 isRetracted "false" @default.
- W4220975878 workType "article" @default.