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- W4221073092 abstract "We have explored the effect of electron injection on the burning conditions and parameters of a high-power impulse magnetron sputtering discharge, including the ion mass-to-charge composition of the discharge plasma. We find that with stabilized discharge burning voltage, electron injection leads to a significant increase in the discharge current and sustains discharge operation in the low pressure regime, but also leads to a lower fraction of metal ions in the plasma. By using a reflecting electrode, conditions are created that provide transport of the injected electron flux directly into the region of intense ionization, and one can preserve the fraction of metal ions in the plasma corresponding to the self-sputtering mode, and also decrease the limiting operating pressure. • Electron injection provides a clear increase in discharge current, but also decreases the fraction of metal ions in the plasma so the discharge exits the self-spattering mode. • The use of a reflecting electrode preserves the high fraction of metal ions in the discharge plasma and allows it to function under a gas pressure range in which a self-maintained magnetron discharge cannot exist." @default.
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- W4221073092 date "2022-06-01" @default.
- W4221073092 modified "2023-09-26" @default.
- W4221073092 title "Parameters and ion mass-to-charge composition of a high-power impulse magnetron discharge with electron injection" @default.
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- W4221073092 doi "https://doi.org/10.1016/j.vacuum.2022.111056" @default.
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