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• W4223535505 abstract "Abstract A two-dimensional self-consistent model has been established in order to investigate the distribution of F-containing species in He/CF 4 atmospheric pressure plasma jet and the effect of CF 4 concentration on the reactive F-containing species. A portion of electron energy is consumed whenever an F is ionized from the CF 4 , resulting that the average densities of <?CDATA ${text{CF}}_4^ + $?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:msubsup> <mml:mrow> <mml:mtext>CF</mml:mtext> </mml:mrow> <mml:mn>4</mml:mn> <mml:mo>+</mml:mo> </mml:msubsup> </mml:math> , <?CDATA ${text{CF}}_2^ + $?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:msubsup> <mml:mrow> <mml:mtext>CF</mml:mtext> </mml:mrow> <mml:mn>2</mml:mn> <mml:mo>+</mml:mo> </mml:msubsup> </mml:math> and CF + decrease sequentially. The density of <?CDATA ${text{CF}}_3^ + $?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:msubsup> <mml:mrow> <mml:mtext>CF</mml:mtext> </mml:mrow> <mml:mn>3</mml:mn> <mml:mo>+</mml:mo> </mml:msubsup> </mml:math> is greater than <?CDATA ${text{CF}}_4^ + $?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:msubsup> <mml:mrow> <mml:mtext>CF</mml:mtext> </mml:mrow> <mml:mn>4</mml:mn> <mml:mo>+</mml:mo> </mml:msubsup> </mml:math> density due to Penning ionization of He* with CF 4 and He + + CF 4 → <?CDATA ${text{CF}}_3^ + $?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:msubsup> <mml:mrow> <mml:mtext>CF</mml:mtext> </mml:mrow> <mml:mn>3</mml:mn> <mml:mo>+</mml:mo> </mml:msubsup> </mml:math> + F + He. In the case of He + 0.5% CF 4 at 200 ns, the electron impact reactions mainly concentrate on the streamer head on the dielectric surface. The Penning ionization of He* with CF 4 dominates in the region of 0 < r < 2.2 mm benefits from long-lived He* of high density and the high concentration CF 4 in this region. As gas flow gradually mixes with ambient air ( r > 2.2 mm), the Penning ionization of metastable He with N 2 and O 2 dominates in this area. As the CF 4 concentration increases from 0.1% to 1%, the densities of F-containing positive ions all increase significantly. CF 3 , F and F 2 also show the upward trend while there is little change in the spatial densities of CF 2 and CF. The F-containing neutral species flux benefits from two factors: the diffusion and the conversion of positive ions. In the case of 0.1% CF 4 , due to the low density of <?CDATA ${text{CF}}_2^ + $?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:msubsup> <mml:mrow> <mml:mtext>CF</mml:mtext> </mml:mrow> <mml:mn>2</mml:mn> <mml:mo>+</mml:mo> </mml:msubsup> </mml:math> , CF + and F + and the diffusion of F, the F flux for is consistent with CF 2 and is greater than CF. However, when CF 4 concentration exceeds 0.5%, the concentration of <?CDATA ${text{CF}}_3^ + $?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:msubsup> <mml:mrow> <mml:mtext>CF</mml:mtext> </mml:mrow> <mml:mn>3</mml:mn> <mml:mo>+</mml:mo> </mml:msubsup> </mml:math> , <?CDATA ${text{CF}}_2^ + $?> <mml:math xmlns:mml=http://www.w3.org/1998/Math/MathML overflow=scroll> <mml:msubsup> <mml:mrow> <mml:mtext>CF</mml:mtext> </mml:mrow> <mml:mn>2</mml:mn> <mml:mo>+</mml:mo> </mml:msubsup> </mml:math> and CF + are much higher than F + . The quenching of positive ions dominates on the dielectric surface in the case of 0.5% and 1% CF 4 , resulting that the flux of F is lower than that of CF 2 and CF." @default.
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• W4223535505 date "2022-04-22" @default.
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• W4223535505 title "The distribution of F-containing species in atmospheric nanosecond He/CF₄ plasma with downstream dielectric material" @default.
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