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• W4223927457 abstract "Abstract Block copolymer (BCP) self‐assembly‐assisted doping for semiconductors is used to achieve discrete doping with nanometer‐scale junction depth, high throughput, and large area coverage. As devices become smaller and more sophisticated, spatial control of dopants becomes more critical. A variety of doping methods, such as monolayer doping and δ ‐doping, have been developed to replace the conventional doping method, ion‐implantation; however, lateral patterning of dopants relies on photo‐ or e‐beam lithography. To address these challenges, a self‐assembling dopant (boron)‐containing BCP is designed to directly pattern dopants on the nanometer scale. This method skips the lithography step and is compatible with directed self‐assembly approaches. The effect of the boron concentration in the BCP on the doping performance is systematically studied by changing the volume fraction of the boron‐containing block while keeping the domain spacing and the mesoscale morphology constant. Successful self‐assembly of the BCP into a hexagonally packed cylindrical morphology is confirmed by small‐angle X‐ray scattering and resonant soft X‐ray scattering with a 26 nm cylinder‐to‐cylinder distance. Doping silicon using these BCPs enables discrete doped areas with shallow (7–13 nm) junction depth as demonstrated by the depth profile of boron, and supported by a sheet resistance study." @default.
• W4223927457 created "2022-04-19" @default.
• W4223927457 creator A5001305555 @default.
• W4223927457 creator A5027223167 @default.
• W4223927457 creator A5029198717 @default.
• W4223927457 creator A5029879703 @default.
• W4223927457 creator A5029981469 @default.
• W4223927457 creator A5065880223 @default.
• W4223927457 creator A5066777161 @default.
• W4223927457 creator A5087544745 @default.
• W4223927457 date "2022-05-01" @default.
• W4223927457 modified "2023-09-30" @default.
• W4223927457 title "Discrete, Shallow Doping of Semiconductors via Cylinder‐Forming Block Copolymer Self‐Assembly" @default.
• W4223927457 cites W1525247245 @default.
• W4223927457 cites W1974374350 @default.
• W4223927457 cites W1975834815 @default.
• W4223927457 cites W1992342771 @default.
• W4223927457 cites W2024290900 @default.
• W4223927457 cites W2039485707 @default.
• W4223927457 cites W2041128541 @default.
• W4223927457 cites W2050705723 @default.
• W4223927457 cites W2060573689 @default.
• W4223927457 cites W2063913793 @default.
• W4223927457 cites W2069798172 @default.
• W4223927457 cites W2071077478 @default.
• W4223927457 cites W2075634859 @default.
• W4223927457 cites W2081701162 @default.
• W4223927457 cites W2090352751 @default.
• W4223927457 cites W2119048217 @default.
• W4223927457 cites W2140444790 @default.
• W4223927457 cites W2145145060 @default.
• W4223927457 cites W2167243995 @default.
• W4223927457 cites W2328117913 @default.
• W4223927457 cites W2406426675 @default.
• W4223927457 cites W2553923349 @default.
• W4223927457 cites W2584635823 @default.
• W4223927457 cites W2587640132 @default.
• W4223927457 cites W2613373372 @default.
• W4223927457 cites W2620474526 @default.
• W4223927457 cites W2773778064 @default.
• W4223927457 cites W2883765107 @default.
• W4223927457 cites W3027694028 @default.
• W4223927457 cites W3106036789 @default.
• W4223927457 cites W3126306820 @default.
• W4223927457 cites W3202772972 @default.
• W4223927457 cites W725035 @default.
• W4223927457 doi "https://doi.org/10.1002/mame.202200155" @default.
• W4223927457 hasPublicationYear "2022" @default.
• W4223927457 type Work @default.
• W4223927457 citedByCount "2" @default.
• W4223927457 countsByYear W42239274572022 @default.
• W4223927457 countsByYear W42239274572023 @default.
• W4223927457 crossrefType "journal-article" @default.
• W4223927457 hasAuthorship W4223927457A5001305555 @default.
• W4223927457 hasAuthorship W4223927457A5027223167 @default.
• W4223927457 hasAuthorship W4223927457A5029198717 @default.
• W4223927457 hasAuthorship W4223927457A5029879703 @default.
• W4223927457 hasAuthorship W4223927457A5029981469 @default.
• W4223927457 hasAuthorship W4223927457A5065880223 @default.
• W4223927457 hasAuthorship W4223927457A5066777161 @default.
• W4223927457 hasAuthorship W4223927457A5087544745 @default.
• W4223927457 hasConcept C108225325 @default.
• W4223927457 hasConcept C120665830 @default.
• W4223927457 hasConcept C121332964 @default.
• W4223927457 hasConcept C171250308 @default.
• W4223927457 hasConcept C178790620 @default.
• W4223927457 hasConcept C185592680 @default.
• W4223927457 hasConcept C191486275 @default.
• W4223927457 hasConcept C191952053 @default.
• W4223927457 hasConcept C192562407 @default.
• W4223927457 hasConcept C204223013 @default.
• W4223927457 hasConcept C2779227376 @default.
• W4223927457 hasConcept C49040817 @default.
• W4223927457 hasConcept C501308230 @default.
• W4223927457 hasConcept C544956773 @default.
• W4223927457 hasConcept C57863236 @default.
• W4223927457 hasConcept C66825105 @default.
• W4223927457 hasConcept C7070889 @default.
• W4223927457 hasConceptScore W4223927457C108225325 @default.
• W4223927457 hasConceptScore W4223927457C120665830 @default.
• W4223927457 hasConceptScore W4223927457C121332964 @default.
• W4223927457 hasConceptScore W4223927457C171250308 @default.
• W4223927457 hasConceptScore W4223927457C178790620 @default.
• W4223927457 hasConceptScore W4223927457C185592680 @default.
• W4223927457 hasConceptScore W4223927457C191486275 @default.
• W4223927457 hasConceptScore W4223927457C191952053 @default.
• W4223927457 hasConceptScore W4223927457C192562407 @default.
• W4223927457 hasConceptScore W4223927457C204223013 @default.
• W4223927457 hasConceptScore W4223927457C2779227376 @default.
• W4223927457 hasConceptScore W4223927457C49040817 @default.
• W4223927457 hasConceptScore W4223927457C501308230 @default.
• W4223927457 hasConceptScore W4223927457C544956773 @default.
• W4223927457 hasConceptScore W4223927457C57863236 @default.
• W4223927457 hasConceptScore W4223927457C66825105 @default.
• W4223927457 hasConceptScore W4223927457C7070889 @default.
• W4223927457 hasIssue "9" @default.
• W4223927457 hasLocation W42239274571 @default.
• W4223927457 hasOpenAccess W4223927457 @default.
• W4223927457 hasPrimaryLocation W42239274571 @default.
• W4223927457 hasRelatedWork W1273469378 @default.

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