FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4224852016> ?p ?o ?g. }

• W4224852016 endingPage "3115" @default.
• W4224852016 startingPage "3115" @default.
• W4224852016 abstract "In order to optimize the process parameters of Si-Si wafer direct bonding at room temperature, Si-Si surface activated bonding (SAB) was performed, and the effect of the argon ion beam current for surface activation treatment on the Si-Si bonding quality was investigated. For the surface activation under the argon ion beam irradiation for 300 s, a smaller ion beam current (10~30 mA) helped to realize a lower percentage of area covered by voids and higher bonding strength. Especially with the surface activation under 30 mA, the bonded Si-Si specimen obtained the highest bonding quality, and its percentage of area covered by voids and bonding strength reached <0.2% and >7.62 MPa, respectively. The transmission electron microscopy analyses indicate that there exists an ultrathin amorphous Si interlayer at the Si-Si bonding interface induced by argon ion beam irradiation to Si wafer surfaces, and its thickness increases as the argon ion beam current rises. The investigation results can be used to optimize the SAB process and promote the applications of SAB in the field of semiconductor devices." @default.
• W4224852016 created "2022-04-27" @default.
• W4224852016 creator A5000403818 @default.
• W4224852016 creator A5004251105 @default.
• W4224852016 creator A5011540763 @default.
• W4224852016 creator A5016661311 @default.
• W4224852016 creator A5019892531 @default.
• W4224852016 creator A5039679140 @default.
• W4224852016 creator A5045471891 @default.
• W4224852016 creator A5059924478 @default.
• W4224852016 date "2022-04-25" @default.
• W4224852016 modified "2023-09-26" @default.
• W4224852016 title "Argon Ion Beam Current Dependence of Si-Si Surface Activated Bonding" @default.
• W4224852016 cites W1763283181 @default.
• W4224852016 cites W1990850462 @default.
• W4224852016 cites W2011068183 @default.
• W4224852016 cites W2022782493 @default.
• W4224852016 cites W2023960162 @default.
• W4224852016 cites W2029637008 @default.
• W4224852016 cites W2042079275 @default.
• W4224852016 cites W2093425897 @default.
• W4224852016 cites W2103125572 @default.
• W4224852016 cites W2161419266 @default.
• W4224852016 cites W2336864876 @default.
• W4224852016 cites W2610333784 @default.
• W4224852016 cites W2789779286 @default.
• W4224852016 cites W2795799492 @default.
• W4224852016 cites W2892373730 @default.
• W4224852016 cites W2892630495 @default.
• W4224852016 cites W2902688530 @default.
• W4224852016 cites W2914796377 @default.
• W4224852016 cites W2947903725 @default.
• W4224852016 cites W2970028665 @default.
• W4224852016 cites W2989400383 @default.
• W4224852016 cites W2991023855 @default.
• W4224852016 cites W3015307764 @default.
• W4224852016 cites W3015458366 @default.
• W4224852016 cites W3193042332 @default.
• W4224852016 doi "https://doi.org/10.3390/ma15093115" @default.
• W4224852016 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/35591449" @default.
• W4224852016 hasPublicationYear "2022" @default.
• W4224852016 type Work @default.
• W4224852016 citedByCount "3" @default.
• W4224852016 countsByYear W42248520162023 @default.
• W4224852016 crossrefType "journal-article" @default.
• W4224852016 hasAuthorship W4224852016A5000403818 @default.
• W4224852016 hasAuthorship W4224852016A5004251105 @default.
• W4224852016 hasAuthorship W4224852016A5011540763 @default.
• W4224852016 hasAuthorship W4224852016A5016661311 @default.
• W4224852016 hasAuthorship W4224852016A5019892531 @default.
• W4224852016 hasAuthorship W4224852016A5039679140 @default.
• W4224852016 hasAuthorship W4224852016A5045471891 @default.
• W4224852016 hasAuthorship W4224852016A5059924478 @default.
• W4224852016 hasBestOaLocation W42248520161 @default.
• W4224852016 hasConcept C111337013 @default.
• W4224852016 hasConcept C113196181 @default.
• W4224852016 hasConcept C121332964 @default.
• W4224852016 hasConcept C145148216 @default.
• W4224852016 hasConcept C146088050 @default.
• W4224852016 hasConcept C160671074 @default.
• W4224852016 hasConcept C161866238 @default.
• W4224852016 hasConcept C171250308 @default.
• W4224852016 hasConcept C178790620 @default.
• W4224852016 hasConcept C184779094 @default.
• W4224852016 hasConcept C185544564 @default.
• W4224852016 hasConcept C185592680 @default.
• W4224852016 hasConcept C192562407 @default.
• W4224852016 hasConcept C201414436 @default.
• W4224852016 hasConcept C2779133538 @default.
• W4224852016 hasConcept C43617362 @default.
• W4224852016 hasConcept C49040817 @default.
• W4224852016 hasConcept C50774322 @default.
• W4224852016 hasConcept C544956773 @default.
• W4224852016 hasConcept C547737533 @default.
• W4224852016 hasConcept C56052488 @default.
• W4224852016 hasConcept C8010536 @default.
• W4224852016 hasConceptScore W4224852016C111337013 @default.
• W4224852016 hasConceptScore W4224852016C113196181 @default.
• W4224852016 hasConceptScore W4224852016C121332964 @default.
• W4224852016 hasConceptScore W4224852016C145148216 @default.
• W4224852016 hasConceptScore W4224852016C146088050 @default.
• W4224852016 hasConceptScore W4224852016C160671074 @default.
• W4224852016 hasConceptScore W4224852016C161866238 @default.
• W4224852016 hasConceptScore W4224852016C171250308 @default.
• W4224852016 hasConceptScore W4224852016C178790620 @default.
• W4224852016 hasConceptScore W4224852016C184779094 @default.
• W4224852016 hasConceptScore W4224852016C185544564 @default.
• W4224852016 hasConceptScore W4224852016C185592680 @default.
• W4224852016 hasConceptScore W4224852016C192562407 @default.
• W4224852016 hasConceptScore W4224852016C201414436 @default.
• W4224852016 hasConceptScore W4224852016C2779133538 @default.
• W4224852016 hasConceptScore W4224852016C43617362 @default.
• W4224852016 hasConceptScore W4224852016C49040817 @default.
• W4224852016 hasConceptScore W4224852016C50774322 @default.
• W4224852016 hasConceptScore W4224852016C544956773 @default.
• W4224852016 hasConceptScore W4224852016C547737533 @default.
• W4224852016 hasConceptScore W4224852016C56052488 @default.
• W4224852016 hasConceptScore W4224852016C8010536 @default.

• next