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- W4225296722 endingPage "126696" @default.
- W4225296722 startingPage "126696" @default.
- W4225296722 abstract "Metalorganic vapor phase epitaxy growth of red emitting laser structures based on (AlGa)1-xInxP (AlGaInP) compounds requires thorough control of In incorporation during growth of AlGaInP layers which heavily depends on growth parameters and reactor state. We established an in situ method to determine the In incorporation in AlGaInP layers during growth without any prior calibration based on ex situ characterization. This requires to model the lattice constants of substrate and growing layer and feed it with the in situ measured wafer temperature, growth rate and wafer curvature. The model makes use of the Stoney equation and Vegard’s law to calculate the In content of AlGaInP layers grown on GaAs substrates. Correlation of in situ results to ex situ results from X-ray diffraction confirmed the accuracy of our method. Our in situ method allowed us to study the influence of dopants on growth of AlGaInP layers. At high temperature Si doping from Si2H6 showed no influence on the In incorporation during growth, however, Zn doping from DMZn showed strong impact on In incorporation and growth rate. In particular, increasing the DMZn/III ratio during AlGaInP growth linearly decreases In incorporation and growth rate. Accordingly, the presence of Zn on the growth surface hinders In incorporation and causes enhanced In re-evaporation from the surface at high temperatures." @default.
- W4225296722 created "2022-05-05" @default.
- W4225296722 creator A5024771221 @default.
- W4225296722 creator A5040117792 @default.
- W4225296722 creator A5072541586 @default.
- W4225296722 date "2022-07-01" @default.
- W4225296722 modified "2023-09-27" @default.
- W4225296722 title "In situ control of indium incorporation in (AlGa)1−xInxP layers" @default.
- W4225296722 cites W1237080147 @default.
- W4225296722 cites W1975643412 @default.
- W4225296722 cites W1986994764 @default.
- W4225296722 cites W2017505324 @default.
- W4225296722 cites W2034286799 @default.
- W4225296722 cites W2066874036 @default.
- W4225296722 cites W2084045251 @default.
- W4225296722 cites W2089384758 @default.
- W4225296722 cites W2987220769 @default.
- W4225296722 doi "https://doi.org/10.1016/j.jcrysgro.2022.126696" @default.
- W4225296722 hasPublicationYear "2022" @default.
- W4225296722 type Work @default.
- W4225296722 citedByCount "0" @default.
- W4225296722 crossrefType "journal-article" @default.
- W4225296722 hasAuthorship W4225296722A5024771221 @default.
- W4225296722 hasAuthorship W4225296722A5040117792 @default.
- W4225296722 hasAuthorship W4225296722A5072541586 @default.
- W4225296722 hasConcept C110738630 @default.
- W4225296722 hasConcept C111368507 @default.
- W4225296722 hasConcept C113196181 @default.
- W4225296722 hasConcept C127313418 @default.
- W4225296722 hasConcept C160671074 @default.
- W4225296722 hasConcept C171250308 @default.
- W4225296722 hasConcept C178790620 @default.
- W4225296722 hasConcept C185592680 @default.
- W4225296722 hasConcept C192562407 @default.
- W4225296722 hasConcept C2524010 @default.
- W4225296722 hasConcept C2776152967 @default.
- W4225296722 hasConcept C2777289219 @default.
- W4225296722 hasConcept C2777822432 @default.
- W4225296722 hasConcept C2778312390 @default.
- W4225296722 hasConcept C2779227376 @default.
- W4225296722 hasConcept C33923547 @default.
- W4225296722 hasConcept C43617362 @default.
- W4225296722 hasConcept C49040817 @default.
- W4225296722 hasConcept C510052550 @default.
- W4225296722 hasConcept C543292547 @default.
- W4225296722 hasConcept C57863236 @default.
- W4225296722 hasConceptScore W4225296722C110738630 @default.
- W4225296722 hasConceptScore W4225296722C111368507 @default.
- W4225296722 hasConceptScore W4225296722C113196181 @default.
- W4225296722 hasConceptScore W4225296722C127313418 @default.
- W4225296722 hasConceptScore W4225296722C160671074 @default.
- W4225296722 hasConceptScore W4225296722C171250308 @default.
- W4225296722 hasConceptScore W4225296722C178790620 @default.
- W4225296722 hasConceptScore W4225296722C185592680 @default.
- W4225296722 hasConceptScore W4225296722C192562407 @default.
- W4225296722 hasConceptScore W4225296722C2524010 @default.
- W4225296722 hasConceptScore W4225296722C2776152967 @default.
- W4225296722 hasConceptScore W4225296722C2777289219 @default.
- W4225296722 hasConceptScore W4225296722C2777822432 @default.
- W4225296722 hasConceptScore W4225296722C2778312390 @default.
- W4225296722 hasConceptScore W4225296722C2779227376 @default.
- W4225296722 hasConceptScore W4225296722C33923547 @default.
- W4225296722 hasConceptScore W4225296722C43617362 @default.
- W4225296722 hasConceptScore W4225296722C49040817 @default.
- W4225296722 hasConceptScore W4225296722C510052550 @default.
- W4225296722 hasConceptScore W4225296722C543292547 @default.
- W4225296722 hasConceptScore W4225296722C57863236 @default.
- W4225296722 hasLocation W42252967221 @default.
- W4225296722 hasOpenAccess W4225296722 @default.
- W4225296722 hasPrimaryLocation W42252967221 @default.
- W4225296722 hasRelatedWork W1982467162 @default.
- W4225296722 hasRelatedWork W2031930886 @default.
- W4225296722 hasRelatedWork W2034353161 @default.
- W4225296722 hasRelatedWork W2044514165 @default.
- W4225296722 hasRelatedWork W2066893010 @default.
- W4225296722 hasRelatedWork W2093079966 @default.
- W4225296722 hasRelatedWork W2094664728 @default.
- W4225296722 hasRelatedWork W2157810942 @default.
- W4225296722 hasRelatedWork W2324734417 @default.
- W4225296722 hasRelatedWork W2381480651 @default.
- W4225296722 hasVolume "590" @default.
- W4225296722 isParatext "false" @default.
- W4225296722 isRetracted "false" @default.
- W4225296722 workType "article" @default.