FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4225420347> ?p ?o ?g. }

• W4225420347 endingPage "139277" @default.
• W4225420347 startingPage "139277" @default.
• W4225420347 abstract "• Solution-processed aluminum titanium oxide(ATO) as a gate insulator is investigated. • HCl was used as hydrolysis catalyst. • ATO films had improved dielectric properties at reduced annealing temperature. • The best ATO film resulted in excellent electrical properties of transistor. This study investigated the effect of hydrochloric acid (HCl) addition on the dielectric properties of solution-processed aluminum titanium oxide (ATO) applied to thin-film transistors (TFTs) as a gate insulator layer. The formation of the solution-processed ATO film can be accelerated by adding HCl to the precursor solution because of the hydrolysis catalyst effect of HCl. The solution-processed ATO film exhibits higher crystallinity as the amount of HCl added increases. Furthermore, the addition of HCl suppresses the formation of oxygen vacancies, which can act as defect states in the ATO film. Consequently, the optimized ATO film annealed at 450 ℃ exhibited minimum leakage current density level of 5.14×10 −9 A/cm 2 at 0.33 MV/cm and dielectric constant of 13.9 when HCl of 2 ml was added to the precursor solution. These results are comparable with the dielectric properties of the ATO film annealed at 750 ℃ without HCl addition, because HCl addition catalyses hydrolysis and enhances the formation of metal-oxide bonding. Solution-processed amorphous indium-gallium-zinc oxide (IGZO) TFTs using the optimized ATO/AlO x film as gate insulator displayed excellent electrical properties such as threshold voltage of 0.17 V, field-effect mobility of 2.59 cm 2 /V∙s, subthreshold swing of 0.22 V/dec, and on/off ratio of 4.54×10 5 . In addition, the IGZO TFT with the ATO gate insulator exhibited superior current driving capability compared to that of silicon dioxide (SiO 2 ). These results indicate that solution-processed ATO films with HCl addition could be promising candidates for gate insulator layers in achieving low power consumption, high performance, and low cost TFTs." @default.
• W4225420347 created "2022-05-05" @default.
• W4225420347 creator A5004418713 @default.
• W4225420347 creator A5006743557 @default.
• W4225420347 creator A5022010111 @default.
• W4225420347 creator A5045293337 @default.
• W4225420347 date "2022-07-01" @default.
• W4225420347 modified "2023-10-17" @default.
• W4225420347 title "Effect of hydrochloric acid addition on dielectric properties of solution-processed aluminum titanium oxide thin film annealed at low temperature" @default.
• W4225420347 cites W1745116713 @default.
• W4225420347 cites W1767199893 @default.
• W4225420347 cites W1896628078 @default.
• W4225420347 cites W1972523103 @default.
• W4225420347 cites W1982680531 @default.
• W4225420347 cites W1988844063 @default.
• W4225420347 cites W1999589524 @default.
• W4225420347 cites W2008960829 @default.
• W4225420347 cites W2030367837 @default.
• W4225420347 cites W2038875696 @default.
• W4225420347 cites W2050276976 @default.
• W4225420347 cites W2058221257 @default.
• W4225420347 cites W2065183056 @default.
• W4225420347 cites W2086351502 @default.
• W4225420347 cites W2090493959 @default.
• W4225420347 cites W2321090280 @default.
• W4225420347 cites W2345171150 @default.
• W4225420347 cites W2408380084 @default.
• W4225420347 cites W2559789277 @default.
• W4225420347 cites W2594237568 @default.
• W4225420347 cites W2758300252 @default.
• W4225420347 cites W2762898881 @default.
• W4225420347 cites W2911027405 @default.
• W4225420347 cites W2949543341 @default.
• W4225420347 cites W3021191711 @default.
• W4225420347 doi "https://doi.org/10.1016/j.tsf.2022.139277" @default.
• W4225420347 hasPublicationYear "2022" @default.
• W4225420347 type Work @default.
• W4225420347 citedByCount "2" @default.
• W4225420347 countsByYear W42254203472023 @default.
• W4225420347 crossrefType "journal-article" @default.
• W4225420347 hasAuthorship W4225420347A5004418713 @default.
• W4225420347 hasAuthorship W4225420347A5006743557 @default.
• W4225420347 hasAuthorship W4225420347A5022010111 @default.
• W4225420347 hasAuthorship W4225420347A5045293337 @default.
• W4225420347 hasConcept C127413603 @default.
• W4225420347 hasConcept C133386390 @default.
• W4225420347 hasConcept C166524527 @default.
• W4225420347 hasConcept C171250308 @default.
• W4225420347 hasConcept C179104552 @default.
• W4225420347 hasConcept C185592680 @default.
• W4225420347 hasConcept C19067145 @default.
• W4225420347 hasConcept C191897082 @default.
• W4225420347 hasConcept C192562407 @default.
• W4225420347 hasConcept C2777436746 @default.
• W4225420347 hasConcept C2777855556 @default.
• W4225420347 hasConcept C2779851234 @default.
• W4225420347 hasConcept C2910700394 @default.
• W4225420347 hasConcept C42360764 @default.
• W4225420347 hasConcept C49040817 @default.
• W4225420347 hasConcept C506065880 @default.
• W4225420347 hasConcept C513153333 @default.
• W4225420347 hasConceptScore W4225420347C127413603 @default.
• W4225420347 hasConceptScore W4225420347C133386390 @default.
• W4225420347 hasConceptScore W4225420347C166524527 @default.
• W4225420347 hasConceptScore W4225420347C171250308 @default.
• W4225420347 hasConceptScore W4225420347C179104552 @default.
• W4225420347 hasConceptScore W4225420347C185592680 @default.
• W4225420347 hasConceptScore W4225420347C19067145 @default.
• W4225420347 hasConceptScore W4225420347C191897082 @default.
• W4225420347 hasConceptScore W4225420347C192562407 @default.
• W4225420347 hasConceptScore W4225420347C2777436746 @default.
• W4225420347 hasConceptScore W4225420347C2777855556 @default.
• W4225420347 hasConceptScore W4225420347C2779851234 @default.
• W4225420347 hasConceptScore W4225420347C2910700394 @default.
• W4225420347 hasConceptScore W4225420347C42360764 @default.
• W4225420347 hasConceptScore W4225420347C49040817 @default.
• W4225420347 hasConceptScore W4225420347C506065880 @default.
• W4225420347 hasConceptScore W4225420347C513153333 @default.
• W4225420347 hasLocation W42254203471 @default.
• W4225420347 hasOpenAccess W4225420347 @default.
• W4225420347 hasPrimaryLocation W42254203471 @default.
• W4225420347 hasRelatedWork W1964664941 @default.
• W4225420347 hasRelatedWork W2035988384 @default.
• W4225420347 hasRelatedWork W2039703849 @default.
• W4225420347 hasRelatedWork W2052412747 @default.
• W4225420347 hasRelatedWork W2220846532 @default.
• W4225420347 hasRelatedWork W2580545854 @default.
• W4225420347 hasRelatedWork W2967788756 @default.
• W4225420347 hasRelatedWork W4225420347 @default.
• W4225420347 hasRelatedWork W4250890523 @default.
• W4225420347 hasRelatedWork W86111499 @default.
• W4225420347 hasVolume "753" @default.
• W4225420347 isParatext "false" @default.
• W4225420347 isRetracted "false" @default.
• W4225420347 workType "article" @default.