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• W4225968100 endingPage "503" @default.
• W4225968100 startingPage "467" @default.
• W4225968100 abstract "Ever since its inception in the late 1980s, chemical-mechanical planarization (CMP) has been the pivotal enabling process in the manufacturing of integrated circuits (IC). Whether it is for front-end-of-the-line (FEOL) applications such as shallow trench isolation (STI) and metal gate, or back-end-of-the-line (BEOL) such as Cu interconnects or through-silicon via (TSV), CMP is the terminal step that completes a process module. As a consequence, the defects observed after CMP have direct impacts on the yield and reliability of the devices and circuits. Provided the nature of CMP process described above and its heavy usage of consumables, CMP-related defects are complicated in nature. Not only does CMP generate defects from its own process and consumables involved, but it also reveals the defects not detected and removed from all the up-stream process steps. In addition, the tolerance and specification for post CMP defect density will only become more stringent as the device dimension continues to decrease with shrinking design ground rule. For example, in the 7 nm technology node, the width of Cu interconnects in the thin wire levels is only around 24 nm, which is smaller than the diameter of abrasive nano particles in most CMP slurries. The presence of any post-CMP defects of equal or greater size on the Cu surface poses serious concern for yield loss. As a consequence, the characterization, mitigation, and reduction of CMP-related defects are among the most important yet challenging tasks in IC manufacturing. In this chapter, CMP defects will be categorized by their formation mechanism. The roles of consumables and processes in the generation of CMP defects will be discussed. The characterization of defects and the strategies to mitigate and reduce these defects will be elaborated. The chapter will be organized according to the following index:" @default.
• W4225968100 created "2022-05-05" @default.
• W4225968100 creator A5074125855 @default.
• W4225968100 date "2022-01-01" @default.
• W4225968100 modified "2023-10-18" @default.
• W4225968100 title "Approaches to defect characterization, mitigation and reduction" @default.
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• W4225968100 cites W2065119147 @default.
• W4225968100 cites W2065553086 @default.
• W4225968100 cites W2069948346 @default.
• W4225968100 cites W2072683894 @default.
• W4225968100 cites W2076769508 @default.
• W4225968100 cites W2079838041 @default.
• W4225968100 cites W2081146295 @default.
• W4225968100 cites W2081566773 @default.
• W4225968100 cites W2081787822 @default.
• W4225968100 cites W2082076259 @default.
• W4225968100 cites W2082573426 @default.
• W4225968100 cites W2095243090 @default.
• W4225968100 cites W2100435523 @default.
• W4225968100 cites W2103205252 @default.
• W4225968100 cites W2122467224 @default.
• W4225968100 cites W2124512461 @default.
• W4225968100 cites W2130992012 @default.
• W4225968100 cites W2133488869 @default.
• W4225968100 cites W2139327636 @default.
• W4225968100 cites W2142084274 @default.
• W4225968100 cites W2154784372 @default.
• W4225968100 cites W2156427942 @default.
• W4225968100 cites W2157566550 @default.
• W4225968100 cites W2160317493 @default.
• W4225968100 cites W2160602749 @default.
• W4225968100 cites W2161338397 @default.
• W4225968100 cites W2161612187 @default.
• W4225968100 cites W2165510840 @default.
• W4225968100 cites W2166022873 @default.
• W4225968100 cites W2169119348 @default.
• W4225968100 cites W2228854801 @default.
• W4225968100 cites W2574341792 @default.
• W4225968100 cites W2736808350 @default.
• W4225968100 cites W2764029410 @default.
• W4225968100 cites W2948771155 @default.
• W4225968100 cites W2953492801 @default.
• W4225968100 cites W2963252641 @default.
• W4225968100 cites W2980675223 @default.
• W4225968100 cites W2991690992 @default.
• W4225968100 cites W3009848449 @default.
• W4225968100 cites W3200102033 @default.
• W4225968100 doi "https://doi.org/10.1016/b978-0-12-821791-7.00006-x" @default.
• W4225968100 hasPublicationYear "2022" @default.
• W4225968100 type Work @default.
• W4225968100 citedByCount "2" @default.
• W4225968100 countsByYear W42259681002022 @default.
• W4225968100 countsByYear W42259681002023 @default.
• W4225968100 crossrefType "book-chapter" @default.
• W4225968100 hasAuthorship W4225968100A5074125855 @default.
• W4225968100 hasConcept C105066941 @default.
• W4225968100 hasConcept C120665830 @default.
• W4225968100 hasConcept C121332964 @default.
• W4225968100 hasConcept C127413603 @default.
• W4225968100 hasConcept C144133560 @default.
• W4225968100 hasConcept C155310634 @default.
• W4225968100 hasConcept C162853370 @default.
• W4225968100 hasConcept C163258240 @default.
• W4225968100 hasConcept C171250308 @default.
• W4225968100 hasConcept C180088628 @default.
• W4225968100 hasConcept C192562407 @default.
• W4225968100 hasConcept C207789793 @default.
• W4225968100 hasConcept C2779227376 @default.
• W4225968100 hasConcept C2780841128 @default.
• W4225968100 hasConcept C43214815 @default.
• W4225968100 hasConcept C49040817 @default.
• W4225968100 hasConcept C530198007 @default.
• W4225968100 hasConcept C61696701 @default.
• W4225968100 hasConcept C62126406 @default.

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