Matches in SemOpenAlex for { <https://semopenalex.org/work/W4226030490> ?p ?o ?g. }
- W4226030490 endingPage "10867" @default.
- W4226030490 startingPage "10867" @default.
- W4226030490 abstract "A rapid direct spectroscopic ellipsometric parameter extraction algorithm for computational speed enhancement of dynamic spectroscopic ellipsometry is described. The proposed direct spectral phase calculation method can provide a faster spectral phase extraction capability than a Fourier transform-based approach, while maintaining the same level of accuracy as that based on the Fourier transform method. We analyze some additional benefits and limitations of the proposed direct computational method in terms of enlarged Δ(λ) measurement spectral range and precision optimization." @default.
- W4226030490 created "2022-05-05" @default.
- W4226030490 creator A5039313028 @default.
- W4226030490 creator A5053813460 @default.
- W4226030490 creator A5076681272 @default.
- W4226030490 creator A5087993360 @default.
- W4226030490 date "2021-12-06" @default.
- W4226030490 modified "2023-10-18" @default.
- W4226030490 title "Speed enhancement of dynamic spectroscopicellipsometry by using direct spectral phase extractionmethod" @default.
- W4226030490 cites W1964496383 @default.
- W4226030490 cites W1998964412 @default.
- W4226030490 cites W2002057604 @default.
- W4226030490 cites W2002190158 @default.
- W4226030490 cites W2008821091 @default.
- W4226030490 cites W2009733773 @default.
- W4226030490 cites W2016371939 @default.
- W4226030490 cites W2034114850 @default.
- W4226030490 cites W2038524423 @default.
- W4226030490 cites W2055865225 @default.
- W4226030490 cites W2062516843 @default.
- W4226030490 cites W2070225922 @default.
- W4226030490 cites W2080506245 @default.
- W4226030490 cites W2084349857 @default.
- W4226030490 cites W2092243497 @default.
- W4226030490 cites W2095398919 @default.
- W4226030490 cites W2111845465 @default.
- W4226030490 cites W2128074892 @default.
- W4226030490 cites W2135268721 @default.
- W4226030490 cites W2170586499 @default.
- W4226030490 cites W2346065687 @default.
- W4226030490 cites W2430953169 @default.
- W4226030490 cites W2614035787 @default.
- W4226030490 cites W2782596652 @default.
- W4226030490 cites W2897607471 @default.
- W4226030490 cites W2939295242 @default.
- W4226030490 cites W2943639846 @default.
- W4226030490 cites W2969898269 @default.
- W4226030490 cites W4232512522 @default.
- W4226030490 cites W4240907095 @default.
- W4226030490 cites W4246526058 @default.
- W4226030490 cites W4249556850 @default.
- W4226030490 doi "https://doi.org/10.1364/ao.441657" @default.
- W4226030490 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/35200848" @default.
- W4226030490 hasPublicationYear "2021" @default.
- W4226030490 type Work @default.
- W4226030490 citedByCount "0" @default.
- W4226030490 crossrefType "journal-article" @default.
- W4226030490 hasAuthorship W4226030490A5039313028 @default.
- W4226030490 hasAuthorship W4226030490A5053813460 @default.
- W4226030490 hasAuthorship W4226030490A5076681272 @default.
- W4226030490 hasAuthorship W4226030490A5087993360 @default.
- W4226030490 hasConcept C102519508 @default.
- W4226030490 hasConcept C11413529 @default.
- W4226030490 hasConcept C120665830 @default.
- W4226030490 hasConcept C121332964 @default.
- W4226030490 hasConcept C159985019 @default.
- W4226030490 hasConcept C171250308 @default.
- W4226030490 hasConcept C18293161 @default.
- W4226030490 hasConcept C19067145 @default.
- W4226030490 hasConcept C192562407 @default.
- W4226030490 hasConcept C202799725 @default.
- W4226030490 hasConcept C204323151 @default.
- W4226030490 hasConcept C41008148 @default.
- W4226030490 hasConcept C44280652 @default.
- W4226030490 hasConcept C62520636 @default.
- W4226030490 hasConcept C75172450 @default.
- W4226030490 hasConcept C87133666 @default.
- W4226030490 hasConceptScore W4226030490C102519508 @default.
- W4226030490 hasConceptScore W4226030490C11413529 @default.
- W4226030490 hasConceptScore W4226030490C120665830 @default.
- W4226030490 hasConceptScore W4226030490C121332964 @default.
- W4226030490 hasConceptScore W4226030490C159985019 @default.
- W4226030490 hasConceptScore W4226030490C171250308 @default.
- W4226030490 hasConceptScore W4226030490C18293161 @default.
- W4226030490 hasConceptScore W4226030490C19067145 @default.
- W4226030490 hasConceptScore W4226030490C192562407 @default.
- W4226030490 hasConceptScore W4226030490C202799725 @default.
- W4226030490 hasConceptScore W4226030490C204323151 @default.
- W4226030490 hasConceptScore W4226030490C41008148 @default.
- W4226030490 hasConceptScore W4226030490C44280652 @default.
- W4226030490 hasConceptScore W4226030490C62520636 @default.
- W4226030490 hasConceptScore W4226030490C75172450 @default.
- W4226030490 hasConceptScore W4226030490C87133666 @default.
- W4226030490 hasFunder F4320322120 @default.
- W4226030490 hasIssue "35" @default.
- W4226030490 hasLocation W42260304901 @default.
- W4226030490 hasLocation W42260304902 @default.
- W4226030490 hasOpenAccess W4226030490 @default.
- W4226030490 hasPrimaryLocation W42260304901 @default.
- W4226030490 hasRelatedWork W1966115495 @default.
- W4226030490 hasRelatedWork W2060468780 @default.
- W4226030490 hasRelatedWork W2082300184 @default.
- W4226030490 hasRelatedWork W2083788924 @default.
- W4226030490 hasRelatedWork W2088542597 @default.
- W4226030490 hasRelatedWork W2099019356 @default.
- W4226030490 hasRelatedWork W2549557013 @default.
- W4226030490 hasRelatedWork W2748952813 @default.
- W4226030490 hasRelatedWork W3139513747 @default.