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- W4226065359 endingPage "111420" @default.
- W4226065359 startingPage "111420" @default.
- W4226065359 abstract "Diamond-like carbon (DLC) films possess excellent tribological properties, such as low friction and high wear resistance. However, DLC films detach easily owing to the high residual stress, which limits their application on mechanical sliding surfaces. To overcome this problem, it is crucial to clarify the residual stress generation mechanism in DLC films. In this study, molecular dynamics simulations were conducted on the deposition process of a DLC film to clarify the residual stress generation mechanism. The results suggest that sp3 hybridization clusters are nucleated in the sp2 formed on the film surface, and sp3 clusters grow in the sp2 carbon through the sp2 → sp3 bond change during the film growth process. The bond length of sp3 was approximately 8.5% larger than that of sp2 under stress-free bulk conditions. Thus, when the sp2 → sp3 bond change occurs under construction by surrounding atoms, compressive stress is generated in the sp3 cluster, which increases with the growth of the sp3 cluster. Based on the results, we conclude that the nucleation and growth of sp3 clusters in sp2 result in residual compressive stress in the DLC film. We believe that the present mechanism clarification of the stress development process in DLC films will facilitate the development of new methods for residual stress reduction." @default.
- W4226065359 created "2022-05-05" @default.
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- W4226065359 date "2022-06-01" @default.
- W4226065359 modified "2023-10-04" @default.
- W4226065359 title "Investigating residual stress evolution in the deposition process of diamond-like carbon film through molecular dynamics" @default.
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- W4226065359 doi "https://doi.org/10.1016/j.commatsci.2022.111420" @default.
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