Matches in SemOpenAlex for { <https://semopenalex.org/work/W4229367920> ?p ?o ?g. }
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- W4229367920 endingPage "813" @default.
- W4229367920 startingPage "813" @default.
- W4229367920 abstract "The effect of a macromolecular additive on the etching rate of aluminum (Al) horizontal etching in the wet process was investigated in this work. The horizontal etching in the Al wet etching process became more evident as the film Al becomes thicker. The proposed macromolecule additive, including polyethylene-polypropylene glycol, was added into the Al etchant solution to reduce the Al horizontal etching rate (ER). The undercut problem during metal patterning can then be improved. By using this method, the Al horizontal ER was reduced from 2.0 to 0.9 μm per minute and the selection ratio between the horizontal and vertical ER was effectively improved from 3 to 1.3 times. As well, a hypothesis of physical mechanism for the improvement was proposed. The dispersed particles from the additive emulsion inhibited the transport and exchange of liquid in a horizontal direction. This work provides an alternative reference to improve the selection ratio performance in the metal wet etching process compared with that when using traditional method." @default.
- W4229367920 created "2022-05-10" @default.
- W4229367920 creator A5004151688 @default.
- W4229367920 creator A5048427415 @default.
- W4229367920 creator A5072778023 @default.
- W4229367920 creator A5079803991 @default.
- W4229367920 creator A5090731570 @default.
- W4229367920 date "2022-05-08" @default.
- W4229367920 modified "2023-09-26" @default.
- W4229367920 title "Investigation of a Macromolecular Additive on the Decrease of the Aluminum Horizontal Etching Rate in the Wet Etching Process" @default.
- W4229367920 cites W1966633423 @default.
- W4229367920 cites W1971422350 @default.
- W4229367920 cites W1982483232 @default.
- W4229367920 cites W1994865736 @default.
- W4229367920 cites W2001931903 @default.
- W4229367920 cites W2063876509 @default.
- W4229367920 cites W2096940034 @default.
- W4229367920 cites W2099920640 @default.
- W4229367920 cites W2110070104 @default.
- W4229367920 cites W2139295525 @default.
- W4229367920 cites W2154281786 @default.
- W4229367920 cites W2884222080 @default.
- W4229367920 cites W2893745697 @default.
- W4229367920 cites W3094588409 @default.
- W4229367920 doi "https://doi.org/10.3390/met12050813" @default.
- W4229367920 hasPublicationYear "2022" @default.
- W4229367920 type Work @default.
- W4229367920 citedByCount "0" @default.
- W4229367920 crossrefType "journal-article" @default.
- W4229367920 hasAuthorship W4229367920A5004151688 @default.
- W4229367920 hasAuthorship W4229367920A5048427415 @default.
- W4229367920 hasAuthorship W4229367920A5072778023 @default.
- W4229367920 hasAuthorship W4229367920A5079803991 @default.
- W4229367920 hasAuthorship W4229367920A5090731570 @default.
- W4229367920 hasBestOaLocation W42293679201 @default.
- W4229367920 hasConcept C100460472 @default.
- W4229367920 hasConcept C127413603 @default.
- W4229367920 hasConcept C159985019 @default.
- W4229367920 hasConcept C171250308 @default.
- W4229367920 hasConcept C191897082 @default.
- W4229367920 hasConcept C192562407 @default.
- W4229367920 hasConcept C2779227376 @default.
- W4229367920 hasConcept C2779292183 @default.
- W4229367920 hasConcept C42360764 @default.
- W4229367920 hasConcept C513153333 @default.
- W4229367920 hasConcept C521977710 @default.
- W4229367920 hasConcept C544153396 @default.
- W4229367920 hasConceptScore W4229367920C100460472 @default.
- W4229367920 hasConceptScore W4229367920C127413603 @default.
- W4229367920 hasConceptScore W4229367920C159985019 @default.
- W4229367920 hasConceptScore W4229367920C171250308 @default.
- W4229367920 hasConceptScore W4229367920C191897082 @default.
- W4229367920 hasConceptScore W4229367920C192562407 @default.
- W4229367920 hasConceptScore W4229367920C2779227376 @default.
- W4229367920 hasConceptScore W4229367920C2779292183 @default.
- W4229367920 hasConceptScore W4229367920C42360764 @default.
- W4229367920 hasConceptScore W4229367920C513153333 @default.
- W4229367920 hasConceptScore W4229367920C521977710 @default.
- W4229367920 hasConceptScore W4229367920C544153396 @default.
- W4229367920 hasFunder F4320321001 @default.
- W4229367920 hasFunder F4320335777 @default.
- W4229367920 hasIssue "5" @default.
- W4229367920 hasLocation W42293679201 @default.
- W4229367920 hasOpenAccess W4229367920 @default.
- W4229367920 hasPrimaryLocation W42293679201 @default.
- W4229367920 hasRelatedWork W1577680211 @default.
- W4229367920 hasRelatedWork W2077634407 @default.
- W4229367920 hasRelatedWork W2137307547 @default.
- W4229367920 hasRelatedWork W2351679279 @default.
- W4229367920 hasRelatedWork W2380293314 @default.
- W4229367920 hasRelatedWork W2943188944 @default.
- W4229367920 hasRelatedWork W3082440218 @default.
- W4229367920 hasRelatedWork W3120216566 @default.
- W4229367920 hasRelatedWork W4285802202 @default.
- W4229367920 hasRelatedWork W2183370071 @default.
- W4229367920 hasVolume "12" @default.
- W4229367920 isParatext "false" @default.
- W4229367920 isRetracted "false" @default.
- W4229367920 workType "article" @default.