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• W4229725690 abstract "An optimized microelectromechanical systems Pirani sensor with increased sensitivity for pressure measurements in the fine and high vacuum regime (from 100 to 10−6 Torr) is presented. Theoretical calculations of the signal voltage as a function of pressure are in good agreement with the measured voltage–pressure response. Fabrication technologies, design optimization using thermal modeling and finite element method simulations, and measurement results are presented." @default.
• W4229725690 created "2022-05-11" @default.
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• W4229725690 date "2013-09-03" @default.
• W4229725690 modified "2023-10-11" @default.
• W4229725690 title "Optimized MEMS Pirani sensor with increased pressure measurement sensitivity in the fine and high vacuum regime" @default.
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• W4229725690 doi "https://doi.org/10.1116/1.4819783" @default.
• W4229725690 hasPublicationYear "2013" @default.
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