Matches in SemOpenAlex for { <https://semopenalex.org/work/W4229962023> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W4229962023 endingPage "187" @default.
- W4229962023 startingPage "187" @default.
- W4229962023 abstract "We have investigated the effect of deposition conditions on the crystal structure and optical properties of InN films deposited by reactive sputtering in pure nitrogen gas.InN films have been deposited onto glass, (0 0 0 1) sapphire and (1 1 1) Si substrates by rf reactive puttering of pure In target. The nitrogen gas pressure, substrate temperature and applied rf power were varied in the range of 0.5–1.3 Pa, RT∼600°C and 20–55 W, respectively. All deposited films had a wurtzite structure with strong 〈0 0 0 1〉 preferred orientation. In the case of the glass substrate, the full-width at half-maximum of InN0 0 0 2 peak became large with increasing applied rf power and/or nitrogen gas pressure. The angular dispersion of the c-axis of films deposited onto sapphire increases with increasing substrate temperature. This behavior was similar to that of the films on glass substrates. The angular dispersion of the c-axis of films deposited on (1 1 1) Si at temperatures between 200° and 450°C was smaller than those films grown on the others. This may suggest the existence of some interactions between the growing InN film and (1 1 1) Si substrate." @default.
- W4229962023 created "2022-05-11" @default.
- W4229962023 date "1971-05-01" @default.
- W4229962023 modified "2023-09-25" @default.
- W4229962023 title "IV. Materials and techniques used in vacuum technology" @default.
- W4229962023 doi "https://doi.org/10.1016/0042-207x(71)91864-1" @default.
- W4229962023 hasPublicationYear "1971" @default.
- W4229962023 type Work @default.
- W4229962023 citedByCount "0" @default.
- W4229962023 crossrefType "journal-article" @default.
- W4229962023 hasConcept C111368507 @default.
- W4229962023 hasConcept C113196181 @default.
- W4229962023 hasConcept C120665830 @default.
- W4229962023 hasConcept C121332964 @default.
- W4229962023 hasConcept C127313418 @default.
- W4229962023 hasConcept C151730666 @default.
- W4229962023 hasConcept C171250308 @default.
- W4229962023 hasConcept C177562468 @default.
- W4229962023 hasConcept C178790620 @default.
- W4229962023 hasConcept C185592680 @default.
- W4229962023 hasConcept C19067145 @default.
- W4229962023 hasConcept C191897082 @default.
- W4229962023 hasConcept C192562407 @default.
- W4229962023 hasConcept C22423302 @default.
- W4229962023 hasConcept C2777289219 @default.
- W4229962023 hasConcept C2780064504 @default.
- W4229962023 hasConcept C2816523 @default.
- W4229962023 hasConcept C3045981 @default.
- W4229962023 hasConcept C43617362 @default.
- W4229962023 hasConcept C520434653 @default.
- W4229962023 hasConcept C535196362 @default.
- W4229962023 hasConcept C537208039 @default.
- W4229962023 hasConcept C64297162 @default.
- W4229962023 hasConcept C86803240 @default.
- W4229962023 hasConceptScore W4229962023C111368507 @default.
- W4229962023 hasConceptScore W4229962023C113196181 @default.
- W4229962023 hasConceptScore W4229962023C120665830 @default.
- W4229962023 hasConceptScore W4229962023C121332964 @default.
- W4229962023 hasConceptScore W4229962023C127313418 @default.
- W4229962023 hasConceptScore W4229962023C151730666 @default.
- W4229962023 hasConceptScore W4229962023C171250308 @default.
- W4229962023 hasConceptScore W4229962023C177562468 @default.
- W4229962023 hasConceptScore W4229962023C178790620 @default.
- W4229962023 hasConceptScore W4229962023C185592680 @default.
- W4229962023 hasConceptScore W4229962023C19067145 @default.
- W4229962023 hasConceptScore W4229962023C191897082 @default.
- W4229962023 hasConceptScore W4229962023C192562407 @default.
- W4229962023 hasConceptScore W4229962023C22423302 @default.
- W4229962023 hasConceptScore W4229962023C2777289219 @default.
- W4229962023 hasConceptScore W4229962023C2780064504 @default.
- W4229962023 hasConceptScore W4229962023C2816523 @default.
- W4229962023 hasConceptScore W4229962023C3045981 @default.
- W4229962023 hasConceptScore W4229962023C43617362 @default.
- W4229962023 hasConceptScore W4229962023C520434653 @default.
- W4229962023 hasConceptScore W4229962023C535196362 @default.
- W4229962023 hasConceptScore W4229962023C537208039 @default.
- W4229962023 hasConceptScore W4229962023C64297162 @default.
- W4229962023 hasConceptScore W4229962023C86803240 @default.
- W4229962023 hasIssue "5" @default.
- W4229962023 hasLocation W42299620231 @default.
- W4229962023 hasOpenAccess W4229962023 @default.
- W4229962023 hasPrimaryLocation W42299620231 @default.
- W4229962023 hasRelatedWork W1979968986 @default.
- W4229962023 hasRelatedWork W2056065354 @default.
- W4229962023 hasRelatedWork W2066892027 @default.
- W4229962023 hasRelatedWork W2074367315 @default.
- W4229962023 hasRelatedWork W2093694889 @default.
- W4229962023 hasRelatedWork W2316948141 @default.
- W4229962023 hasRelatedWork W2325214546 @default.
- W4229962023 hasRelatedWork W2362778450 @default.
- W4229962023 hasRelatedWork W2364528318 @default.
- W4229962023 hasRelatedWork W3147040838 @default.
- W4229962023 hasVolume "21" @default.
- W4229962023 isParatext "false" @default.
- W4229962023 isRetracted "false" @default.
- W4229962023 workType "article" @default.