Matches in SemOpenAlex for { <https://semopenalex.org/work/W4230243525> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W4230243525 endingPage "624" @default.
- W4230243525 startingPage "624" @default.
- W4230243525 abstract "Miniaturized medical devices are becoming increasingly adopted by doctors and patients because they enable new treatment and monitoring capabilities, minimally invasive surgery, improved portability and ease of use. Recent examples include micro pacemakers, micro cochlear implants and ex-situ micro glucose sensors. However, implantable micro devices employing packaging technologies other than metallic enclosures are yet to be seen. Such metallic containers are expensive and can make up to 80% of the volume of the final medical micro device. Physiological monitors such as in-situ pressure sensors and BioMEMS could profit significantly from advances in thin barrier films for corrosion protection of silicon micro devices. Coating films that stop the diffusion and permeation of harmful substances are necessary to protect both the patient and the micro device. Ceramic films deposited by chemical vapor deposition techniques are good candidates for this task due to their low permeability to gases, low chemical reactivity and high conformality. However, few studies are available about the corrosion protection offered by biocompatible coatings to microelectronic devices in representative biological environments. Nine materials previously found non-cytotoxic in-vitro were studied: Al 2 O 3 , BN, DLC, HfO 2 , SiC, SiN, SiO 2 , SiOC, and TiO 2 . Ultra-thin films of these materials (5-100 nm) were deposited by plasma enhanced chemical vapor deposition (PECVD) or atomic layer deposition (ALD) on substrates commonly found in electronic micro devices: crystalline silicon, copper, tungsten nitride and polyimide. Characterization of films was performed by x-ray photo electron spectroscopic (XPS), x-ray diffraction (XRD), x-ray reflectometry (XRR), atomic force microscopy (AFM), variable angle spectroscopic ellipsometry (VASE) and helium gas permeability measurements. Aging tests of silicon, copper and tungsten nitride substrates coated with these films were performed for several weeks at different temperatures in phosphate buffer saline (PBS), a saline solution that simulates the chemical environment of human blood plasma. Changes in thickness and chemical composition were monitored by VASE, XPS and time-of-flight secondary ion mass spectroscopy (TOF-SIMS). It was found that SiO 2 and SiN films (generally used for protection in the microelectronics industry) are not stable in PBS at 37°C, even though they act as good hermetic barriers against gases. In contrast, films of Al 2 O 3 , DLC, SiOC and TiO 2 showed very low chemical reactivity in PBS, and one of them was effective as hermetic and diffusion barrier for the corrosion protection of metallic substrates of interest for silicon micro systems. A discussion on the advantages and disadvantages of deposited films and recommendations for corrosion protection of miniaturized medical devices are also included." @default.
- W4230243525 created "2022-05-11" @default.
- W4230243525 creator A5051578442 @default.
- W4230243525 creator A5066876755 @default.
- W4230243525 creator A5079825495 @default.
- W4230243525 date "2015-07-07" @default.
- W4230243525 modified "2023-09-26" @default.
- W4230243525 title "Corrosion Protection of Silicon Micro Systems with Ultra-Thin Barrier Films for Miniaturized Medical Devices" @default.
- W4230243525 doi "https://doi.org/10.1149/ma2015-02/11/624" @default.
- W4230243525 hasPublicationYear "2015" @default.
- W4230243525 type Work @default.
- W4230243525 citedByCount "2" @default.
- W4230243525 countsByYear W42302435252022 @default.
- W4230243525 countsByYear W42302435252023 @default.
- W4230243525 crossrefType "journal-article" @default.
- W4230243525 hasAuthorship W4230243525A5051578442 @default.
- W4230243525 hasAuthorship W4230243525A5066876755 @default.
- W4230243525 hasAuthorship W4230243525A5079825495 @default.
- W4230243525 hasConcept C127413603 @default.
- W4230243525 hasConcept C159985019 @default.
- W4230243525 hasConcept C171250308 @default.
- W4230243525 hasConcept C175708663 @default.
- W4230243525 hasConcept C187937830 @default.
- W4230243525 hasConcept C19067145 @default.
- W4230243525 hasConcept C192562407 @default.
- W4230243525 hasConcept C20625102 @default.
- W4230243525 hasConcept C2777431650 @default.
- W4230243525 hasConcept C2781448156 @default.
- W4230243525 hasConcept C38347018 @default.
- W4230243525 hasConcept C42360764 @default.
- W4230243525 hasConcept C49040817 @default.
- W4230243525 hasConcept C544956773 @default.
- W4230243525 hasConcept C57410435 @default.
- W4230243525 hasConcept C69544855 @default.
- W4230243525 hasConceptScore W4230243525C127413603 @default.
- W4230243525 hasConceptScore W4230243525C159985019 @default.
- W4230243525 hasConceptScore W4230243525C171250308 @default.
- W4230243525 hasConceptScore W4230243525C175708663 @default.
- W4230243525 hasConceptScore W4230243525C187937830 @default.
- W4230243525 hasConceptScore W4230243525C19067145 @default.
- W4230243525 hasConceptScore W4230243525C192562407 @default.
- W4230243525 hasConceptScore W4230243525C20625102 @default.
- W4230243525 hasConceptScore W4230243525C2777431650 @default.
- W4230243525 hasConceptScore W4230243525C2781448156 @default.
- W4230243525 hasConceptScore W4230243525C38347018 @default.
- W4230243525 hasConceptScore W4230243525C42360764 @default.
- W4230243525 hasConceptScore W4230243525C49040817 @default.
- W4230243525 hasConceptScore W4230243525C544956773 @default.
- W4230243525 hasConceptScore W4230243525C57410435 @default.
- W4230243525 hasConceptScore W4230243525C69544855 @default.
- W4230243525 hasIssue "11" @default.
- W4230243525 hasLocation W42302435251 @default.
- W4230243525 hasOpenAccess W4230243525 @default.
- W4230243525 hasPrimaryLocation W42302435251 @default.
- W4230243525 hasRelatedWork W1864742594 @default.
- W4230243525 hasRelatedWork W1897821317 @default.
- W4230243525 hasRelatedWork W1970711916 @default.
- W4230243525 hasRelatedWork W1997841126 @default.
- W4230243525 hasRelatedWork W2036891017 @default.
- W4230243525 hasRelatedWork W2104186298 @default.
- W4230243525 hasRelatedWork W2152054726 @default.
- W4230243525 hasRelatedWork W2361156483 @default.
- W4230243525 hasRelatedWork W2891055371 @default.
- W4230243525 hasRelatedWork W2552878513 @default.
- W4230243525 hasVolume "MA2015-02" @default.
- W4230243525 isParatext "false" @default.
- W4230243525 isRetracted "false" @default.
- W4230243525 workType "article" @default.