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- W4230406942 abstract "Abstract This paper presents a formulation for calculating the reflectance and transmittance of classical light for a simple structure that contains a rectangularly shaped line grating layer that lies atop a thick transparent or weakly absorbing substrate layer. It is assumed that the substrate thickness is sufficiently large and non-uniform that when the light traverses it is averaged over a large surface area, the averaged field is considered as losing phase coherence and intensities can be added. It is assumed that the optical properties of the media in the various homogeneous regions of the structure are complex, local, linear, isotropic, and non-magnetic. This kind of structure has important applications in the metrology of linewidths for the semiconductor integrated circuit industry." @default.
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- W4230406942 date "1996-12-01" @default.
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- W4230406942 title "On calculating the reflectance and transmittance of light for a simple thick grating structure" @default.
- W4230406942 doi "https://doi.org/10.1080/095003496154400" @default.
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