FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4230486273> ?p ?o ?g. }

• W4230486273 endingPage "79" @default.
• W4230486273 startingPage "46" @default.
• W4230486273 abstract "To enable the Simulation of the electric behavior of a device the configuration of the device (i. e. geometry and composition of the material it is made of) is, obviously, one of the prerequisite pieces of input information. Optimal design of a device necessitates the capability to predict the effect of modifying any of the various process steps involved in device fabrication. One principle barrier for predictive device Simulation is the uncertainty of the results of process models due to still inadequate understanding of their underlying solid-state physics and chemistry. Particularly in the development of devices for integrated circuits and their technology, the need for process models is growing dramatically due to the tight coupling of two and three dimensional device effects with the doping profile [3.18]. Owing to these purposes, many Computer programs capable of modeling quite generally the various processing steps of device fabrication have been developed, and they have proven to be extremely valuable tools, e. g. ICECREM [3.64], [3.67]; LADIS [3.76]; MEMBRE [3.54]; RECIPE [3.73]; SUPRA [3.15], [3.38], [3.39], [3.50] and the extraordinarily well established SUPREM program [3.4], [3.5], [3.50], [3.51], [3.59]." @default.
• W4230486273 created "2022-05-11" @default.
• W4230486273 creator A5043510129 @default.
• W4230486273 date "1984-01-01" @default.
• W4230486273 modified "2023-10-16" @default.
• W4230486273 title "Process Modeling" @default.
• W4230486273 cites W175991443 @default.
• W4230486273 cites W1967576038 @default.
• W4230486273 cites W1970093247 @default.
• W4230486273 cites W1972811581 @default.
• W4230486273 cites W1973982943 @default.
• W4230486273 cites W1976954836 @default.
• W4230486273 cites W1978927743 @default.
• W4230486273 cites W1986052693 @default.
• W4230486273 cites W1986113429 @default.
• W4230486273 cites W1986188448 @default.
• W4230486273 cites W1989596198 @default.
• W4230486273 cites W1990383014 @default.
• W4230486273 cites W1991711103 @default.
• W4230486273 cites W1997850781 @default.
• W4230486273 cites W1999287749 @default.
• W4230486273 cites W2005247557 @default.
• W4230486273 cites W2005331166 @default.
• W4230486273 cites W2010503724 @default.
• W4230486273 cites W2014940325 @default.
• W4230486273 cites W2015502934 @default.
• W4230486273 cites W2021927974 @default.
• W4230486273 cites W2023632182 @default.
• W4230486273 cites W2026934726 @default.
• W4230486273 cites W2028441549 @default.
• W4230486273 cites W2028829482 @default.
• W4230486273 cites W2030902104 @default.
• W4230486273 cites W2031060713 @default.
• W4230486273 cites W2034290592 @default.
• W4230486273 cites W2035552387 @default.
• W4230486273 cites W2036829009 @default.
• W4230486273 cites W2039063477 @default.
• W4230486273 cites W2040365163 @default.
• W4230486273 cites W2041125154 @default.
• W4230486273 cites W2051024068 @default.
• W4230486273 cites W2052708586 @default.
• W4230486273 cites W2054071945 @default.
• W4230486273 cites W2058019252 @default.
• W4230486273 cites W2059729558 @default.
• W4230486273 cites W2059824139 @default.
• W4230486273 cites W2063987596 @default.
• W4230486273 cites W2074272656 @default.
• W4230486273 cites W2074881823 @default.
• W4230486273 cites W2075319381 @default.
• W4230486273 cites W2075494096 @default.
• W4230486273 cites W2080392331 @default.
• W4230486273 cites W2084697473 @default.
• W4230486273 cites W2088201711 @default.
• W4230486273 cites W2093914900 @default.
• W4230486273 cites W2108906545 @default.
• W4230486273 cites W2123213999 @default.
• W4230486273 cites W2142081503 @default.
• W4230486273 cites W2166799497 @default.
• W4230486273 cites W2171859074 @default.
• W4230486273 cites W2478482127 @default.
• W4230486273 cites W2503613843 @default.
• W4230486273 cites W2977274996 @default.
• W4230486273 cites W33139186 @default.
• W4230486273 cites W4206123979 @default.
• W4230486273 cites W4214752864 @default.
• W4230486273 cites W582312204 @default.
• W4230486273 doi "https://doi.org/10.1007/978-3-7091-8752-4_3" @default.
• W4230486273 hasPublicationYear "1984" @default.
• W4230486273 type Work @default.
• W4230486273 citedByCount "2" @default.
• W4230486273 crossrefType "book-chapter" @default.
• W4230486273 hasAuthorship W4230486273A5043510129 @default.
• W4230486273 hasConcept C119599485 @default.
• W4230486273 hasConcept C127413603 @default.
• W4230486273 hasConcept C131584629 @default.
• W4230486273 hasConcept C134146338 @default.
• W4230486273 hasConcept C136525101 @default.
• W4230486273 hasConcept C142724271 @default.
• W4230486273 hasConcept C199360897 @default.
• W4230486273 hasConcept C204787440 @default.
• W4230486273 hasConcept C41008148 @default.
• W4230486273 hasConcept C71924100 @default.
• W4230486273 hasConcept C78519656 @default.
• W4230486273 hasConcept C98045186 @default.
• W4230486273 hasConceptScore W4230486273C119599485 @default.
• W4230486273 hasConceptScore W4230486273C127413603 @default.
• W4230486273 hasConceptScore W4230486273C131584629 @default.
• W4230486273 hasConceptScore W4230486273C134146338 @default.
• W4230486273 hasConceptScore W4230486273C136525101 @default.
• W4230486273 hasConceptScore W4230486273C142724271 @default.
• W4230486273 hasConceptScore W4230486273C199360897 @default.
• W4230486273 hasConceptScore W4230486273C204787440 @default.
• W4230486273 hasConceptScore W4230486273C41008148 @default.
• W4230486273 hasConceptScore W4230486273C71924100 @default.
• W4230486273 hasConceptScore W4230486273C78519656 @default.
• W4230486273 hasConceptScore W4230486273C98045186 @default.
• W4230486273 hasLocation W42304862731 @default.
• W4230486273 hasOpenAccess W4230486273 @default.

• next