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• W4230785462 endingPage "1457" @default.
• W4230785462 startingPage "1437" @default.
• W4230785462 abstract "The commercialization of MEMS/NEMS devices is proceeding slower than expected, because the reliability problems of microscopic components differ from macroscopically known behavior. In this chapter, we provide an overview of the state of the art in MEMS/NEMS reliability. We discuss the specific, MEMS-related problems caused by stiction due to surface forces and electric charge. Materials issues such as creep and fatigue are treated as well. Nanoscale wear is covered briefly. MEMS packaging is also discussed, because the reliability of MEMS/NEMS components critically depends on the available protection from the environment." @default.
• W4230785462 created "2022-05-11" @default.
• W4230785462 creator A5017003921 @default.
• W4230785462 creator A5023285948 @default.
• W4230785462 creator A5061504157 @default.
• W4230785462 creator A5064531772 @default.
• W4230785462 date "2017-01-01" @default.
• W4230785462 modified "2023-10-18" @default.
• W4230785462 title "Failure Mechanisms in MEMS/NEMS Devices" @default.
• W4230785462 cites W1549593594 @default.
• W4230785462 cites W1555043449 @default.
• W4230785462 cites W1568984194 @default.
• W4230785462 cites W1974687098 @default.
• W4230785462 cites W1975216008 @default.
• W4230785462 cites W1980303764 @default.
• W4230785462 cites W1980843058 @default.
• W4230785462 cites W1981996417 @default.
• W4230785462 cites W1985781005 @default.
• W4230785462 cites W1986157557 @default.
• W4230785462 cites W1987977138 @default.
• W4230785462 cites W1998348849 @default.
• W4230785462 cites W2004958101 @default.
• W4230785462 cites W2010294723 @default.
• W4230785462 cites W2016241234 @default.
• W4230785462 cites W2016352472 @default.
• W4230785462 cites W2018468947 @default.
• W4230785462 cites W2020486099 @default.
• W4230785462 cites W2026071277 @default.
• W4230785462 cites W2026732753 @default.
• W4230785462 cites W2027174312 @default.
• W4230785462 cites W2028895511 @default.
• W4230785462 cites W2030285085 @default.
• W4230785462 cites W2030672925 @default.
• W4230785462 cites W2034123534 @default.
• W4230785462 cites W2035352323 @default.
• W4230785462 cites W2041305466 @default.
• W4230785462 cites W2044026456 @default.
• W4230785462 cites W2047256382 @default.
• W4230785462 cites W2051710382 @default.
• W4230785462 cites W2053594443 @default.
• W4230785462 cites W2059832534 @default.
• W4230785462 cites W2062421211 @default.
• W4230785462 cites W2062529820 @default.
• W4230785462 cites W2080854208 @default.
• W4230785462 cites W2081633336 @default.
• W4230785462 cites W2082317633 @default.
• W4230785462 cites W2085812998 @default.
• W4230785462 cites W2093333193 @default.
• W4230785462 cites W2096377642 @default.
• W4230785462 cites W2099525122 @default.
• W4230785462 cites W2102374119 @default.
• W4230785462 cites W2104765787 @default.
• W4230785462 cites W2119151825 @default.
• W4230785462 cites W2127401408 @default.
• W4230785462 cites W2128968874 @default.
• W4230785462 cites W2129037965 @default.
• W4230785462 cites W2130113088 @default.
• W4230785462 cites W2135817898 @default.
• W4230785462 cites W2137728233 @default.
• W4230785462 cites W2143914153 @default.
• W4230785462 cites W2153287632 @default.
• W4230785462 cites W2158828250 @default.
• W4230785462 cites W2162869577 @default.
• W4230785462 cites W4230282064 @default.
• W4230785462 cites W4246237647 @default.
• W4230785462 cites W4324262476 @default.
• W4230785462 doi "https://doi.org/10.1007/978-3-662-54357-3_40" @default.
• W4230785462 hasPublicationYear "2017" @default.
• W4230785462 type Work @default.
• W4230785462 citedByCount "8" @default.
• W4230785462 countsByYear W42307854622019 @default.
• W4230785462 countsByYear W42307854622020 @default.
• W4230785462 countsByYear W42307854622021 @default.
• W4230785462 countsByYear W42307854622022 @default.
• W4230785462 crossrefType "book-chapter" @default.
• W4230785462 hasAuthorship W4230785462A5017003921 @default.
• W4230785462 hasAuthorship W4230785462A5023285948 @default.
• W4230785462 hasAuthorship W4230785462A5061504157 @default.
• W4230785462 hasAuthorship W4230785462A5064531772 @default.
• W4230785462 hasConcept C110339231 @default.
• W4230785462 hasConcept C121332964 @default.
• W4230785462 hasConcept C15083742 @default.
• W4230785462 hasConcept C155672457 @default.
• W4230785462 hasConcept C163258240 @default.
• W4230785462 hasConcept C171250308 @default.
• W4230785462 hasConcept C173409883 @default.
• W4230785462 hasConcept C17744445 @default.
• W4230785462 hasConcept C192562407 @default.
• W4230785462 hasConcept C199539241 @default.
• W4230785462 hasConcept C2780625559 @default.
• W4230785462 hasConcept C37977207 @default.
• W4230785462 hasConcept C43214815 @default.
• W4230785462 hasConcept C62520636 @default.
• W4230785462 hasConceptScore W4230785462C110339231 @default.
• W4230785462 hasConceptScore W4230785462C121332964 @default.
• W4230785462 hasConceptScore W4230785462C15083742 @default.
• W4230785462 hasConceptScore W4230785462C155672457 @default.
• W4230785462 hasConceptScore W4230785462C163258240 @default.

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