Matches in SemOpenAlex for { <https://semopenalex.org/work/W4230843751> ?p ?o ?g. }
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- W4230843751 endingPage "42" @default.
- W4230843751 startingPage "35" @default.
- W4230843751 abstract "Total reflection x-ray photoelectron spectroscopy (TRXPS) has been applied to measure contamination elements on Si wafers using an x-ray photoelectron spectrometer. The radiated x-rays are limited by a slit placed in front of the Al anode, and the grazing angle is made shallow by using a crystal to make it possible for parallel x-rays to radiate the sample surface. In this experiment, the grazing angle of x-rays (Al Kα) was 1.1°, which satisfies the total reflection condition. The samples used are Si wafers contaminated with Fe and Cu. It is observed that the background intensity of photoelectron spectrum decreases with the penetration depth of x-rays, but the photoelectron peak intensity does not decrease remarkably. The detection limit of TRXPS was found to be 9×10 10 atoms cm-2 for Fe and Cu contamination on Si wafers. As a result, the detection limit of TRXPS has been improved to more than 100 times in comparison with that of normal-type XPS. Accordingly, it can be said that TRXPS is a very effective method for the contamination analysis of Si wafers. © 1999 John Wiley & Sons, Ltd." @default.
- W4230843751 created "2022-05-11" @default.
- W4230843751 creator A5035894637 @default.
- W4230843751 creator A5059024390 @default.
- W4230843751 creator A5085609717 @default.
- W4230843751 date "1999-01-01" @default.
- W4230843751 modified "2023-09-23" @default.
- W4230843751 title "Detection of surface impurities on Si wafers using total reflection x‐ray photoelectron spectroscopy" @default.
- W4230843751 doi "https://doi.org/10.1002/(sici)1096-9918(199901)27:1<35::aid-sia461>3.3.co;2-r" @default.
- W4230843751 hasPublicationYear "1999" @default.
- W4230843751 type Work @default.
- W4230843751 citedByCount "0" @default.
- W4230843751 crossrefType "journal-article" @default.
- W4230843751 hasAuthorship W4230843751A5035894637 @default.
- W4230843751 hasAuthorship W4230843751A5059024390 @default.
- W4230843751 hasAuthorship W4230843751A5085609717 @default.
- W4230843751 hasConcept C113196181 @default.
- W4230843751 hasConcept C119128265 @default.
- W4230843751 hasConcept C120665830 @default.
- W4230843751 hasConcept C121332964 @default.
- W4230843751 hasConcept C160671074 @default.
- W4230843751 hasConcept C170395517 @default.
- W4230843751 hasConcept C175708663 @default.
- W4230843751 hasConcept C178790620 @default.
- W4230843751 hasConcept C185592680 @default.
- W4230843751 hasConcept C192562407 @default.
- W4230843751 hasConcept C199360897 @default.
- W4230843751 hasConcept C2779328170 @default.
- W4230843751 hasConcept C33390570 @default.
- W4230843751 hasConcept C41008148 @default.
- W4230843751 hasConcept C43617362 @default.
- W4230843751 hasConcept C46141821 @default.
- W4230843751 hasConcept C49040817 @default.
- W4230843751 hasConcept C65682993 @default.
- W4230843751 hasConcept C71987851 @default.
- W4230843751 hasConceptScore W4230843751C113196181 @default.
- W4230843751 hasConceptScore W4230843751C119128265 @default.
- W4230843751 hasConceptScore W4230843751C120665830 @default.
- W4230843751 hasConceptScore W4230843751C121332964 @default.
- W4230843751 hasConceptScore W4230843751C160671074 @default.
- W4230843751 hasConceptScore W4230843751C170395517 @default.
- W4230843751 hasConceptScore W4230843751C175708663 @default.
- W4230843751 hasConceptScore W4230843751C178790620 @default.
- W4230843751 hasConceptScore W4230843751C185592680 @default.
- W4230843751 hasConceptScore W4230843751C192562407 @default.
- W4230843751 hasConceptScore W4230843751C199360897 @default.
- W4230843751 hasConceptScore W4230843751C2779328170 @default.
- W4230843751 hasConceptScore W4230843751C33390570 @default.
- W4230843751 hasConceptScore W4230843751C41008148 @default.
- W4230843751 hasConceptScore W4230843751C43617362 @default.
- W4230843751 hasConceptScore W4230843751C46141821 @default.
- W4230843751 hasConceptScore W4230843751C49040817 @default.
- W4230843751 hasConceptScore W4230843751C65682993 @default.
- W4230843751 hasConceptScore W4230843751C71987851 @default.
- W4230843751 hasIssue "1" @default.
- W4230843751 hasLocation W42308437511 @default.
- W4230843751 hasOpenAccess W4230843751 @default.
- W4230843751 hasPrimaryLocation W42308437511 @default.
- W4230843751 hasRelatedWork W1660000098 @default.
- W4230843751 hasRelatedWork W2000068224 @default.
- W4230843751 hasRelatedWork W2001352983 @default.
- W4230843751 hasRelatedWork W2064454642 @default.
- W4230843751 hasRelatedWork W2076145858 @default.
- W4230843751 hasRelatedWork W2079550494 @default.
- W4230843751 hasRelatedWork W2080362364 @default.
- W4230843751 hasRelatedWork W2396676890 @default.
- W4230843751 hasRelatedWork W4239962038 @default.
- W4230843751 hasRelatedWork W4245628308 @default.
- W4230843751 hasVolume "27" @default.
- W4230843751 isParatext "false" @default.
- W4230843751 isRetracted "false" @default.
- W4230843751 workType "article" @default.