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- W4231503535 abstract "Resistors with TCR = 0 are important as reference resistors in many measurement instruments. We developed thin film resistors with resistance R between 1 and 5 kOhms and adjustable TCR's between −150 ppm °C−1 and +500 ppm °C−1. The resistors consist of TaN thin films which are covered with overlying rectangular Nipads. R and TCR could be adjusted by varying process and geometry parameters. The thin films were sputter deposited and structured by photolithography. TCRs were found to be reproducible within ±3% from batch to batch. We were able to design thin film systems with TCR = 0 for temperatures between 20 and 80°C." @default.
- W4231503535 created "2022-05-12" @default.
- W4231503535 date "1998-09-01" @default.
- W4231503535 modified "2023-10-14" @default.
- W4231503535 title "Workshop B: Molecules basis of immune recognition" @default.
- W4231503535 doi "https://doi.org/10.1016/s0171-2985(98)80002-8" @default.
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