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- W4233355360 abstract "This chapter introduces the reader to the field of metrology. Some of the key areas and terms are explained, with particular emphasis on fundamental metrology. The chapter then goes on to explain where the focused ion beam fits into the metrological framework and gives some examples of where instruments of this type might find use. As the focused ion beam can be used in multiple areas of study, involving many different metrological units and spanning many orders of magnitude, we describe where the typical length scales of structures imaged and modified by focused ion beam are applicable in these different fields." @default.
- W4233355360 created "2022-05-12" @default.
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- W4233355360 date "2015-10-01" @default.
- W4233355360 modified "2023-10-18" @default.
- W4233355360 title "Metrology" @default.
- W4233355360 doi "https://doi.org/10.1088/978-1-6817-4084-3ch1" @default.
- W4233355360 hasPublicationYear "2015" @default.
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